Spin valve GMR film structure, biosensor employing same and biosensor manufacturing method

Abstract

The invention discloses a spin valve giant magneto resistive (GMR) film structure comprising a substrate, a buffer layer, a synthetic free layer, an isolation layer, a pinned layer, a pining layer and an overburden layer which are sequentially stacked from bottom to top, wherein the isolation layer is made from a non-magnetic material. The spin valve GMR film structure disclosed by the invention has high reluctivity and a strong coercive force, improves the detection limit of biomolecule concentration, and is suitable for volume production and application. The invention also discloses a biosensor, a biosensor manufacturing method, a multi-channel scan circuit detection system and a biological detection method.

Description

technical field [0001] The invention relates to the fields of microelectronics and medical technology, in particular to a spin-valve GMR thin film structure, a biosensor with it, a method for making the biosensor, a multi-channel scanning circuit detection system with the biosensor, and a biodetection method. Background technique [0002] Magnetic biosensor technology is prepared based on various magnetoresistance effects. It senses the weak magnetic signal generated by a certain concentration of biomolecular magnetic markers, and converts the magnetic signal into an electrical signal, thereby realizing the qualitative and quantitative detection of the biomolecules to be tested. a new technology. Since Professor Fert's research group discovered the GMR effect in 1988, the applied research based on this effect has developed rapidly, and has become an international example of the rapid transformation of basic research into commercial applications. Compared with traditional de...

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Problems solved by technology

However, due to the limitations of the research environment and conditions, the performance of the prepared GMR film cannot reach the ideal level. The circuit detection system is simple and rough, and they all stay at the level of using the GMR sensor to detect the surface magnetic balls, and have not really achieved magnetic label immunity. The detection technology of immobilizing active biomolecules on the surface of the sensor and then collecting and processing the magnetic ball signal. Therefore, there is no practical product of magnetically labeled GMR biosensors, which are used in the diagnosis of diseases in the medical field.

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