Spin valve GMR film structure, biosensor employing same and biosensor manufacturing method

A technology of biosensor and thin film structure, which is applied in the fields of microelectronics and medicine, can solve the problems of simple and rough circuit detection system, and the performance of GMR film cannot reach the ideal level, so as to achieve protection from solution erosion, stable production technology and stable technology Effect

Inactive Publication Date: 2012-10-03
TSINGHUA UNIV
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Problems solved by technology

However, due to the limitations of the research environment and conditions, the performance of the prepared GMR film cannot reach the ideal level. The circuit detection system is simple and rough, and they all stay at the level of using the GMR sensor to detect the surface magnetic balls, and have not really achieved ma

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  • Spin valve GMR film structure, biosensor employing same and biosensor manufacturing method
  • Spin valve GMR film structure, biosensor employing same and biosensor manufacturing method
  • Spin valve GMR film structure, biosensor employing same and biosensor manufacturing method

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Embodiment Construction

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0037] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, components and arrangements of specific examples are described below. Of course, they are only examples and are not intended to limit the invention. Furthermore, the present invention may repeat reference numerals and / or letters in different instances. This repetition is for the purpose of simplicity and clarity and does not in itself indicat...

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Abstract

The invention discloses a spin valve giant magneto resistive (GMR) film structure comprising a substrate, a buffer layer, a synthetic free layer, an isolation layer, a pinned layer, a pining layer and an overburden layer which are sequentially stacked from bottom to top, wherein the isolation layer is made from a non-magnetic material. The spin valve GMR film structure disclosed by the invention has high reluctivity and a strong coercive force, improves the detection limit of biomolecule concentration, and is suitable for volume production and application. The invention also discloses a biosensor, a biosensor manufacturing method, a multi-channel scan circuit detection system and a biological detection method.

Description

technical field [0001] The invention relates to the fields of microelectronics and medical technology, in particular to a spin-valve GMR thin film structure, a biosensor with it, a method for making the biosensor, a multi-channel scanning circuit detection system with the biosensor, and a biodetection method. Background technique [0002] Magnetic biosensor technology is prepared based on various magnetoresistance effects. It senses the weak magnetic signal generated by a certain concentration of biomolecular magnetic markers, and converts the magnetic signal into an electrical signal, thereby realizing the qualitative and quantitative detection of the biomolecules to be tested. a new technology. Since Professor Fert's research group discovered the GMR effect in 1988, the applied research based on this effect has developed rapidly, and has become an international example of the rapid transformation of basic research into commercial applications. Compared with traditional de...

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Application Information

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IPC IPC(8): G01N27/72
Inventor 曲炳郡杨华雷博
Owner TSINGHUA UNIV
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