Colored photosensitive resin composition for preparation of color filter of solid-state image sensing device using 300 nm or less ultrashort wave exposure equipment, color filter using same, and solid-state image sensing device containing same
一种固体摄像元件、感光性树脂的技术,应用在滤光片、光学元件、光学等方向,能够解决感光度及分辨率降低、染料耐热性、耐光性差、不能固化等问题,达到线特性优异、分辨率高的效果
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[0133] The preparation method of the color filter of the present invention comprises a coating film forming step, an exposing step, and a developing step. In the coating film forming step, the colored photosensitive resin composition of the present invention is coated on a substrate to form a coating film; in the exposing step, a mask is used to form the coating film with an ultra-short wavelength The area with the colored pattern is irradiated with ultra-short wavelength laser below 300nm, and exposed; the developing step removes the unexposed coating film area in the exposing step to form the colored pattern.
[0134] The coating film forming step is to apply the colored photosensitive resin composition on the substrate to form a coating film, and the substrate can be a glass plate, a silicon wafer, and polyethersulfone (PES) or polycarbonate (Polycarbonate). , PC) and other plastic-based boards, etc., the type is not particularly limited.
[0135] The coating can be carrie...
Embodiment 1
[0154] Based on 100% of the total solid content of the photosensitive resin composition except the solvent, a pulverized material consisting of 28.5% of colorant C.I. Pigment Red 254, 9.5% of colorant C.I. Pigment Yellow 139, and 6.44% of polyester dispersant , to 25.15.% binder resin (weight-average molecular weight 22000, acid value 80mgKOH / g, methacrylic acid and benzyl methacrylate copolymer), 12.58% photopolymerizable compound (dipentaerythritol hexaacrylate (KAYARAD DPHA; Nippon Kayaku (Co., Ltd.))) and 12.58% pentaerythritol triacrylate (Weiyuan Trading Company (Co., Ltd.)), 5% photoinitiator 1-hydroxycyclohexyl phenyl ketone (Irgacure 184; Ciba Fine Chemicals ( Ciba specialty Chemical) company), 0.25% adhesion promoter 2-(3,4-epoxycyclohexyl)-ethyltrimethoxysilane, add solvent propylene glycol methyl ether acetate (so that the weight ratio of solid content: solvent 2:8), and mixed with the above pulverized material under stirring at 23°C to obtain a colored photosensit...
Embodiment 2~4
[0156] A photosensitive resin composition was prepared in the same manner as in Example 1 except that the contents of each component were shown in Table 1.
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