Power bipolar transistor and manufacture method thereof
A bipolar transistor and power technology, which is applied in the manufacture of transistors, semiconductor/solid-state devices, electrical components, etc., can solve the problems of power bipolar transistors, such as power consumption, high hazard, and increase of parasitic resistance of the base region, and achieves The effect of alleviating the current edge-setting effect in the emitter region and improving the secondary breakdown power capacity
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2013-01-02
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention belongs to the field of semiconductor devices and process manufacturing, and in particular relates to a power bipolar transistor structure and a preparation method thereof. Background technique
[0002] Power bipolar transistors have been used commercially since the 1950s. Although the emergence of power MOSFETs in the 1970s replaced power bipolar transistors in some applications, they are still widely used as switching devices in various small and medium-sized power electronic circuits due to their mature technology and strong current handling capabilities. The physical characteristics of power bipolar transistors are essentially similar to ordinary triodes, but in order to achieve high collector voltages of power bipolar transistors, a high-resistance collector region is introduced.
[0003] Secondary breakdown is one of the main causes of failure of power bipolar transistors in applications. Secondary breakdown is usually irrecoverabl...
Examples
Embodiment Construction
[0029] A power bipolar transistor such as figure 1 As shown, it includes from bottom to top: metal electrode 1 in the collector region, collector region 2 made of heavily doped semiconductor material of the first conductivity type, base region 3 made of semiconductor material of the second conductivity type; base region 3 There are metal electrodes 6 in the base area and an emission area 4 made of the first conductivity type semiconductor material which are in contact with the surface of the base area 3; above the emission area 4 are metal electrodes 7 in contact with the surface of the emission area 4; An isolation medium 5 is filled between the sidewall of the emitter region 4 and the metal electrode 6 of the base region, and between the metal electrode 6 of the base region and the metal electrode 7 of the emitter region.
[0030] A preparation method of a power bipolar transistor, as shown in the figure Figure 5-a — Figure 5-f shown, including the following steps:
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