Device and method for counting micro-particles based on micro-nanofiber

Abstract

The invention discloses a device and a method for counting micro-particles based on a micro-nanofiber. The device comprises a narrow linewidth laser, a fiber isolator, a fiber coupler, the micro-nanofiber, a signal light detector and a reference light detector, the coupled mode of the fiber coupler is 2X2, an output end of the laser is connected to the fiber isolator through a fiber and then connected to a first port of the fiber coupler, the signal light detector is connected with the micro-nanofiber and then connected to a third port of the fiber coupler, and the reference light detector is connected to a fourth port of the fiber coupler through a fiber. The device has the advantages that micron-diameter particles are sensed by the aid of large evanescent field of the micro-nanofiber, owing to high light confinement capacity and guide capacity of the micro-nanofiber, the shortcomings of scattered beam energy and difficulty in gathering and detecting scattered light of a traditional optical method are overcome, and difficulty in realizing high stability and resonance frequency of resonant quality sensing is avoided in principle.

Description

technical field

[0001] The invention relates to a device and method for counting microparticles based on micronano optical fibers. Background technique

[0002] Microparticle sensing technology has an urgent application demand in systems that require clean control, such as chemical macromolecular detection, semiconductor technology, and high-throughput laser systems. The National Ignition Facility Project (National Ignition Facility Project, referred to as NIF, which provides laser ignition for nuclear fusion) has established a "clean control protocol (CCP)" for optical components involving high luminous flux and the surrounding environment, and the manufacturing, cleaning and installation of core components And the materials are strictly regulated to ensure that the laser system has as little residual pollutants as possible during the manufacturing and installation process, and produces as little pollutants as possible during use. To achieve the final ignition goal of the ...

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