Polycrystalline-silicon reducing and producing process and device

Abstract

The invention discloses a polycrystalline-silicon reducing and producing process which comprises the following steps: (a1) vaporizing trichlorosilane by a trichlorosilane vaporizer to obtain vaporous trichlorosilane; (a2) preheating hydrogen to obtain heated hot hydrogen at the same time, (a3) mixing the vaporous trichlorosilane and the hot hydrogen uniformly by a static mixer according to the proportion of excess of hydrogen to form the raw material mixed gas; (a4) increasing the temperature of the raw material mixed gas by a thermostatic heat exchanger and keeping the raw material mixed gas at constant temperature; and (a5) feeding the mixed gas with constant temperature into a reducing furnace. The polycrystalline-silicon reducing and producing process has the advantages of low power consumption, high deposition rate of polycrystalline silicon and high conversion rate of trichlorosilane in one time. The invention further discloses a polycrystalline-silicon reducing and producing device.

Description

technical field [0001] The invention relates to the field of polysilicon production, in particular to an improved Siemens method polysilicon reduction production process and device. Background technique [0002] Polysilicon reduction furnace is the core equipment for producing final products in polysilicon production, and its process is also a key link in determining system capacity and energy consumption. Therefore, the design of polysilicon reduction furnace process flow directly affects product quality, output and production cost. Under the influence of the global economic crisis, the price of polysilicon continues to drop, the market competition is becoming increasingly fierce, and the voice of enterprises to "survive" is getting higher and higher. Therefore, effectively reducing polysilicon energy consumption, improving product quality, and increasing production efficiency are important issues that polysilicon production enterprises need to solve at present. [0003] ...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to propose a polysilicon reduction production with stable thermal energy utilization and low energy consumption of the reduction furnace in view of the insufficient utilization of heat energy in the existing large-scale improved Siemens method polysilicon reduction furnace, and the energy consumption of the reduction furnace is difficult to achieve the expected effect Process and device

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