A compound semiconductor solar cell
A technology of solar cells and semiconductors, applied in semiconductor devices, circuits, photovoltaic power generation, etc., can solve problems such as high power generation costs and obstacles to rapid commercialization, and achieve low contact resistance, good ohmic contact, and cost reduction.
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[0021] The present invention will be further described below in conjunction with embodiment.
[0022] In existing compound semi-semiconductor solar cells, p-type materials are usually used as growth substrates, such as p-type Ge substrates, p-type GaAs substrates or p-type InP substrates. Taking the GaInP / GaAs / Ge triple-junction solar cell as an example, the full structure 100 of the GaInP / GaAs / Ge triple-junction solar cell is generally epitaxially formed on a p-type Ge substrate, and then the n-type GaAs ohmic contact layer 101 is continuously epitaxially formed. The doping concentration is 5×10 18 / cm 3 , and finally obtain the GaInP / GaAs / Ge triple-junction cell epitaxial structure on the conventional p-type Ge substrate. In the process of making the battery chip, the AuGeNi / Au metal electrode 102 is evaporated on the n-type GaAs ohmic contact layer 101. After rapid thermal annealing at 380°C for 3 minutes, the battery obtains a good ohmic contact, and its resistivity is 2...
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