Capacitive high polymer humidity sensor with micron gridded porous electrode and manufacturing method thereof

A technology of humidity sensor and porous electrode, applied in the direction of material capacitance, etc., can solve the problem of poor reliability of capacitive polymer humidity sensor, etc.

Inactive Publication Date: 2013-01-23
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of poor reliability of capacitive polymer humidity sensors that do not increase in size at present. The present invention provides a capacitive polymer humidity sensor with micron grid-shaped porous electrodes and a manufacturing method thereof

Method used

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  • Capacitive high polymer humidity sensor with micron gridded porous electrode and manufacturing method thereof

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specific Embodiment approach 1

[0018] Specific embodiment one: the capacitive polymer humidity sensor with the micron grid shape porous electrode described in the present embodiment, it comprises substrate 1 and humidity-sensitive capacitance film, and humidity-sensitive capacitance film comprises lower electrode 4, dielectric layer 5 and The upper electrode 6; it is characterized in that, the upper electrode 6 is a micro-grid porous electrode, and the pores are through holes arranged in an array, and the lower electrode 4 includes a transitional metal thin layer and a gold film.

specific Embodiment approach 2

[0019] Specific implementation mode two: combination figure 1 This implementation mode is described. This implementation mode is further limited to the capacitive polymer humidity sensor with micron grid-like porous electrodes described in the first specific implementation mode, and it also includes an insulating layer.

[0020] In this embodiment, the insulating layer includes a silicon dioxide layer 2 and a silicon nitride layer 3 .

specific Embodiment approach 3

[0021] Specific embodiment three: this embodiment further defines the capacitive polymer humidity sensor with micron mesh porous electrodes described in specific embodiment one, and the transition metal thin layer is a chromium thin layer or a titanium thin layer .

[0022] The function of the chromium thin layer or titanium thin layer is to increase the adhesion strength between the bottom electrode 4 metal and the substrate 1 .

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Abstract

The invention discloses a capacitive high polymer humidity sensor with a micron gridded porous electrode and a manufacturing method thereof, relates to a capacitive high polymer humidity sensor and a manufacturing method thereof and aims to solve the problem that the capacitive high polymer humidity sensor with the unchanged size is low in reliability at present. The sensor comprises a substrate, a lower electrode, a dielectric layer and an upper electrode, wherein the upper electrode is a micron gridded porous electrode; a plurality of holes are through holes which are formed in an array way; and the lower electrode comprises a transitional metal thin layer and a metal film. The manufacturing method comprises the following steps of: employing a method compatible with a high polymer humidity-sensitive material, forming a metal film with a plurality of gridded holes which are formed in the array way and have the overall thickness of 0.5 to 1mu m, wherein the width of each hole gap and each line of the gridded holes is in a micron order of magnitude; and welding a lead at a pad position of the metal film with the thickness of 0.5 to 1mu m. The capacitive high polymer humidity sensor is used for a sensor for detecting the humidity.

Description

technical field [0001] The invention relates to a capacitive polymer humidity sensor, in particular to a capacitive polymer humidity sensor with micron grid-like porous electrodes and a manufacturing method thereof. Background technique [0002] The capacitive polymer humidity sensor is made on an insulating substrate 1 with a capacitor made of a polymer sensitive material as a dielectric, and the dielectric constant of the polymer dielectric layer changes with the moisture content it absorbs. The upper and lower plates of the capacitor are made of metal film, and the capacitance signal is drawn from the two electrodes, which requires that both electrodes have a certain thickness and be weldable. In order to ensure that it is sensitive to humidity, the electrodes on the sensitive layer need to be porous and breathable to ensure that water vapor can enter and exit the sensitive layer. Conductive solderability of the metal film requires that the film has a certain thickness a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 金建东郑丽齐虹李玉玲王平王明伟田雷司良有王成杨
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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