Cerium-terbium co-doped strontium titanate light-emitting film and preparation method thereof as well as organic electroluminescence device
A light-emitting thin film and co-doping technology, which is applied in the direction of electroluminescence light source, electric solid-state device, electric component, etc.
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[0018] Step S1, preparation of ceramic target material: according to the general chemical formula Sr 1-x-y TiO 3 :xCe 3+ , yTb 3+ Stoichiometric ratio of each element in SrO, TiO 2 、Ce 2 o 3 and Tb 4 o 7 The powder is uniformly mixed, sintered at 900-1300°C (preferably 1250°C), and cooled naturally to obtain a target sample, which is cut into a target with a diameter of 50mm and a thickness of 2mm; where x The value range is 0.0001-0.033, the value range of y is 0.0001-0.039, the preferred value of x is 0.009, and the preferred value of y is 0.012;
[0019] Step S2, put the target and substrate in step S1 into the vacuum chamber of the magnetron sputtering coating equipment, and use a mechanical pump and a molecular pump to pump the vacuum of the chamber to 1.0×10 -3 Pa~1.0×10 -5 Pa, preferably 5.0×10 -4 Pa;
[0020] Step S3, adjusting the magnetron sputtering coating process parameters as follows: the base-target distance is 45-90mm, preferably 60mm; the substrate ...
Embodiment 1
[0027] 1. Select SrO and TiO with a purity of 99.99% respectively 2 、Ce 2 o 3 and Tb 4 o 7 Powder, according to mass percentage: SrO~57%, Ce 2 o 3 ~0.8%, Tb 4 o 7 ~1.2% and TiO 2 ~41%, weighing SrO, TiO 2 、Ce 2 o 3 and Tb 4 o 7 The mass numbers of the powders are 57g, 0.8g, 1.2g, and 41g respectively; these powders are uniformly mixed, sintered at 1250°C, and cooled naturally to obtain target samples, which are cut into diameters of 50mm and thicknesses of 2mm target;
[0028] 2. Put the target into the vacuum chamber of the magnetron sputtering coating equipment;
[0029] 3. Clean the glass ultrasonically with acetone, absolute ethanol and deionized water successively, and perform oxygen plasma treatment on it, and then put it into the vacuum chamber of the magnetron sputtering coating equipment; among them, the distance between the target and the glass Set to 60mm;
[0030] 4. Use a mechanical pump and a molecular pump to pump the vacuum of the vacuum chamber...
Embodiment 2
[0034] 1. Select SrO and TiO with a purity of 99.99% respectively 2 、Ce 2 o 3 and Tb 4 o 7 Powder, according to the mass percentage SrO ~ 45%, Ce 2 o 3 ~0.01%, Tb 4 o 7 ~4% and TiO 2 ~50.99%, weighed SrO, TiO 2 、Ce 2 o 3 and Tb 4 o 7 The mass numbers of the powders are 45g, 0.01g, 4g, and 50.99g respectively; these powders are uniformly mixed, sintered at 900°C, and cooled naturally to obtain target samples, which are cut into diameters of 50mm and thicknesses of 2mm target;
[0035] 2. Put the target into the vacuum chamber of the magnetron sputtering coating equipment;
[0036] 3. Clean the glass ultrasonically with acetone, absolute ethanol and deionized water successively, and perform oxygen plasma treatment on it, and then put it into the vacuum chamber of the magnetron sputtering coating equipment; among them, the distance between the target and the glass Set to 45mm;
[0037] 4. Use a mechanical pump and a molecular pump to pump the vacuum of the vacuum ...
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