Superconducting switch with two-sided yttrium barium copper oxide (YBCO) thin film structure
A technology of superconducting switch and thin-film structure, which is applied in the direction of superconducting components, devices that can switch between superconducting and normal conducting states, etc., and can solve the problems of difficult turn-off time and turn-off resistance electrical standards, performance needs to be improved, etc.
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[0017] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation.
[0018] figure 1 It is a multilayer structure of a superconducting switch. The main body of the switch is composed of YBCO film material with a double-sided structure. The YBCO superconducting layer is grown on both sides of a two-inch-diameter MgO substrate 4 through a double-inverted target sputtering method. Considering the verticality of the sidewall and the protection of the underlying structure of the film and the substrate during etching, the etching technology of laser-assisted chemical etching is used to divide the superconducting layer into a tortuous path blocked by the etching gap 100; the superconducting layer has several The etched holes 3 are scattered, and the etched holes on the front and back sides are arranged in a staggered manner. This structure was prepared by double-inverted-drum target sputtering. Use the same techno...
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