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Special multifunctional ion plating gun having compact structure

An ion plating gun with a compact structure, applied in ion implantation plating, sputtering plating, vacuum evaporation plating, etc., can solve the difficult to achieve special coating requirements, large plasma vacancy area, difficult target replacement, etc. problem, to achieve the effect of easy promotion, compact and simple structure, simple, compact and effective structure

Active Publication Date: 2013-03-06
温州驰诚真空机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a special multifunctional ion plating gun with a compact structure, which is used to improve the traditional arc ion plating arc source with complex structure, poor adaptability, single function, difficulty in meeting special coating requirements, complicated operation, and difficult target replacement. , poor position adjustability, and large plasma void area

Method used

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  • Special multifunctional ion plating gun having compact structure
  • Special multifunctional ion plating gun having compact structure
  • Special multifunctional ion plating gun having compact structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] figure 1 It is a schematic diagram of the two-dimensional plane structure of the special multifunctional ion plating gun with a compact structure in Embodiment 1 of the present invention; as can be seen from the figure, the special multifunctional ion plating gun with a compact structure in Embodiment 1 of the present invention includes: a disc-shaped target material 1, Target shielding cover 2, target base cooling copper plate 3, target base 4, target base cooling channel partition 5, target bottom column connecting pipe 6, permanent magnet or magnetic ring 7, cooling water inlet pipe 8, Electromagnetic coil 9, target bottom column 10, target bottom column insulation cover 11, ion plating gun chassis insulation plate 12, ion plating gun chassis 13, ion plating gun chassis fastening plate 14, cooling water channel base 15, water inlet 16 , water outlet 17 etc., concrete structure is as follows:

[0049] The shape of the target 1 is disc-shaped, the size of the target i...

Embodiment 2

[0062] Figure 9 It is a schematic diagram of a two-dimensional plane structure of a special multifunctional ion plating gun with a cylindrical compact structure and a cylindrical target in Example 2 of the present invention; Figure 10 It is a schematic diagram of the distribution of the axial magnetic field around the cylindrical target in Example 2 of the present invention. The structure is similar to that of Embodiment 1, except that the target structure is a cylindrical target 33, and the electromagnetic coil 9 generates axial magnetic force lines 34, and between the axial magnetic force lines 34 is an intersection angle 38 between the magnetic field and the target; it can be seen that the axial divergence The magnetic field forms an acute angle with the cylindrical magnetic field pointing towards the top of the target. At the same time, a parallel component pointing to the top of the target is formed on the side of the cylindrical target. Therefore, driven by the magne...

Embodiment 3

[0064] Figure 11 It is a schematic diagram of a two-dimensional plane structure of a special multifunctional ion plating gun with a conical compact structure and a target material in Example 3 of the present invention; Figure 12 It is a schematic diagram of the distribution of the axial magnetic field around the conical target in Example 3 of the present invention; it is similar to Example 2, except that the target structure is a conical target 35, which proves the adaptability of the multi-target structure of the present invention, and the electromagnetic coil 9 Axial magnetic force lines 34 are generated, and an angle 38 between the axial magnetic force lines 34 is the intersection angle 38 between the magnetic field and the target. The conical target 35 has a truncated conical target cooling water chamber 36. In Embodiment 3, the target cooling copper plate 3 is modified, and it is set as a truncated conical structure matching the truncated conical target cooling water ch...

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Abstract

The present invention relates to the field of surface protection coating preparation, particularly to a special multifunctional ion plating gun having a compact structure. According to the special multifunctional ion plating gun, a target is arranged on a target base, and a target base cooling cooper plate is adopted to carry out indirect cooling; an upper cooling water channel and a lower cooling water channel are formed inside the target base through a cooling channel separation plate; the target base is arranged on an elongated target bottom column, and an electromagnetic coil is sleeved around the target bottom column on the rear of the target base; the bottom of the target bottom column is provided with a cooling water channel base, and the cooling water channel base is connected with a cooling water pipe; a power supply connector terminal is arranged on the target bottom column; and an ion plating gun chassis is arranged on the target bottom column through an insulation sleeve, and an ion plating gun device is connected with a vacuum chamber through an installation hole of the ion plating gun chassis. With the present invention, disadvantages of complex arc source structure, poor adaptability, single function, difficult special film coating requirement achievement, complex operation, high target replacement difficulty, poor position adjustment, large plasma vacancy area and the like of the traditional electrical arc ion plating are improved.

Description

technical field [0001] The invention relates to the field of surface protective coating preparation, in particular to a special multifunctional ion plating gun with compact structure. Background technique [0002] Surface protective coating technology is an important way to improve the quality and service life of tools, molds and mechanical parts. As one of the material surface protection technologies, PVD technology has the advantages of wide functionality, good environmental protection and huge synergy. , can improve the mechanical properties such as wear resistance, corrosion resistance, heat resistance and fatigue strength of the surface of tools, molds and mechanical parts, and greatly increase the added value of products, so as to ensure that modern mechanical parts and tools and molds can operate at high speed, high temperature, Reliable and continuous operation under the conditions of high pressure, heavy load and strong corrosive media. PVD is mainly divided into t...

Claims

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Application Information

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IPC IPC(8): C23C14/32
Inventor 郎文昌
Owner 温州驰诚真空机械有限公司
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