An unbalanced dynamic arch compatible axially guided magnetic field assisted ion plating device
A magnetic field-assisted, magnetic field generating device technology, applied in the field of surface protective coating, can solve the problems of not simultaneously solving the plasma inhomogeneity, not perfecting the magnetic field design, and difficult to achieve arc spot, etc., so as to improve arc spot discharge and improve magnetic field distribution. , Control the effect of arc spot movement
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Embodiment 1
[0043] figure 2 For Example 1, a special multifunctional ion plating gun with a compact structure is used as the arc source body supporting the target, the yoke is placed in the target bottom column of the ion plating gun, and the electromagnetic coil is placed in the target bottom post at the rear end of the target base Schematic diagram of an unbalanced dynamic arch compatible axially guided magnetic field-assisted ion plating device formed around an in-coupling magnetic field generator.
[0044] The dynamic arched magnetic field of the target surface is formed by the coupling between the internal coupling magnetic field device and the first-level external coupling magnetic field generator. The internal coupling magnetic field of the small-size target or large-size target combined with the large-size permanent magnet or yoke diverges on the target surface and Contrary to the magnetic poles of the first-level external coupling magnetic field, the internal coupling magnetic f...
Embodiment 2
[0066] image 3 In Example 2, the arc source of the double-layer water-cooled target base with a wide middle gap is used as the arc source body supporting the target, and the permanent magnet device is placed in the middle gap of the target base at the rear end of the target to form an in-coupling magnetic field generating device. Schematic diagram of a balanced dynamic arch-compatible axially guided magnetic field-assisted ion plating device.
[0067] The permanent magnet device consists of a permanent magnet and a connecting rod to form a nut. The permanent magnet is connected to the nut through the connecting rod. Shape, cone shape, cylinder shape or ladder shape; the permanent magnet device is connected with the threaded hole at the bottom of the target base through the thread of the connecting rod, and can be adjusted in and out by twisting the nut to adjust the magnetic field strength. The permanent magnet device is placed on the target In the middle gap of the rear tar...
Embodiment 3
[0078] Figure 4 In Example 3, the arc source of the double-layer water-cooled target base with a wide middle gap is used as the arc source body supporting the target, the yoke is placed in the middle gap of the target base at the rear end of the target, and the electromagnetic coil is placed around the target base to form a Schematic diagram of an unbalanced dynamic arch-compatible axially guided magnetic field-assisted ion plating device with an in-coupling magnetic field generator. Wherein, the in-coupling magnetic field generator 2 is composed of an in-coupling magnetic field generator core 4 arranged in the center of the in-coupling magnetic field generator coil 3, the in-coupling magnetic field generator 2 is arranged on the back side of the target 1, and the in-coupling magnetic field generator core 4 Between the outer side and the coil 3 of the inner coupling magnetic field generating device, a target base is set coaxially surrounded by an inner cylinder 35 and an oute...
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