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Stripping agent containing alkylamide mixture

A technology of alkyl amide and stripper, applied in the field of alkyl amide stripper, can solve problems such as difficult recycling, high evaporation rate, loss and cost reduction, etc., achieve environmental protection, simple composition, and reduce production cost Effect

Active Publication Date: 2013-04-03
THE CHEMOURS CO FC LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the composition of the known stripping agent is quite complex, and may be composed of 4 to 6 chemical substances, so it is very difficult to recycle, and after recycling, a very complicated reduction procedure is required to recombine the stripping agent
Therefore, recycling known strippers is not easy to achieve reasonable economic benefits in practical applications, and also reduces the willingness of factories to use stripper recovery systems. In this way, not only lose the opportunity to reduce costs, but also cause a considerable burden on the environment
[0006] In addition, because the components of many known strippers are highly volatile and prone to excessively high evaporation rates, the bath life of these strippers is limited and special precautions are required during their storage and use. Precautions for human and environmental safety
[0007] However, the simple composition strippers available so far cannot completely remove the photoresist from various substrates.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0049] A. Peeling and corrosion test of copper foil:

[0050] Cut a piece of copper foil of an appropriate size (about 6cmx26cm, about 2.2g), and use a microetch to clean the surface of the copper foil to remove oxides on the surface. After washing with deionized water and drying, the weight of the copper foil (initial weight) was accurately measured. Put the copper foil into a beaker containing 400g of stripping agent (see Table 1 for components), test the corrosion resistance to copper, heat it at 80°C for 8 hours, wash it with deionized water and dry it, and measure it accurately Post-test weight of copper foil. Calculate the weight reduction of copper foil and calculate its corrosion rate (see Table 2).

[0051] Table I

[0052]

formula

Comparative example 1

100% DMAC

Comparative example 2

100% NMF

Comparative example 3

DMAC(60%)+NMF(40%)

Comparative example 4

DMAC(59%)+NMF(40%)+tetraethylene glycol(1%)

Exa...

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PUM

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Abstract

The invention relates to a stripping agent containing an alkylamide mixture. The stripping agent containing an alkylamide mixture comprises 50-70wt% of N-methylformamide, 30-50wt% of N,N-dimethylacetamide, and the balance water. The stripping agent containing an alkylamide mixture has water intersolubility, no corrosivity to copper or a copper alloy, and no toxicity to human and the environment. Because the stripping agent containing an alkylamide mixture only comprises the two main ingredients, the used stripping agent can be easily recovered by fractionation and is restructured into an original formula for recycle in the manufacturing process, thus the effects of reducing a cost and protecting the environment are achieved. The invention further provides a method for removing light resistance by the stripping agent containing an alkylamide mixture.

Description

technical field [0001] The invention relates to a stripping agent containing an alkylamide mixture, in particular to an alkylamide stripping agent used for removing photoresists or for cleaning or removing an alignment film. Background technique [0002] The technology industry continues to develop and progress, and the technology of thin film transistor liquid crystal display (TFT-LCD) is constantly evolving, and because thin film transistor liquid crystal display has small size, no space, low power consumption, low radiation, and durable products, etc. Therefore, it has gradually replaced displays made of cathode ray tubes (CRT). Moreover, as the demand for displays continues to increase, the output of thin film transistor liquid crystal displays is gradually increasing, and following the evolution of technology generations, five-generation, six-generation, seven-generation, and even eight-generation factories are constantly being built. The amount invested in the display...

Claims

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Application Information

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IPC IPC(8): G03F7/42H01L21/311
CPCG03F7/422G03F7/425
Inventor 李豪浚毛台之吴富其张楷键方旭强
Owner THE CHEMOURS CO FC LLC
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