Piezoresistive strain gauge with ceramic substrate

A ceramic substrate and ceramic substrate technology, applied in the field of strain gauges, can solve the problems of short life, easy aging, poor stability, etc., and achieve the effects of low cost, good insulation, and small creep

Active Publication Date: 2013-04-17
ADVANCED PLATINUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the easy aging of organic matter, the sensor manufactured by the above-mentioned strain gauge and bonding process has poor stability and short life, and is not suitable for use under high temperature conditions.

Method used

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  • Piezoresistive strain gauge with ceramic substrate
  • Piezoresistive strain gauge with ceramic substrate
  • Piezoresistive strain gauge with ceramic substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Figure 7 ~ Figure 13 It is a schematic diagram of Embodiment 1 of the present invention. This embodiment is a strain gauge with a single resistance, which is suitable for applications such as load cells.

[0044] Such as Figure 7 ~ Figure 13 As shown, the upper surface of the ceramic substrate 301 is printed and sintered to form a conductor layer 302, a thick film resistance layer 303, and an insulating protective layer 304, and then the sealing glass paste is printed on the lower surface of the ceramic substrate 301, dried or Sintering forms the sealing glass layer 305 . The ceramic substrate 301 is made of an alumina ceramic sheet with a thickness of about 0.1 mm. The conductive layer 302 is made of gold paste with a film thickness of about 1-5 microns. The thick-film resistance layer 303 is a single resistance, and the ruthenium-based resistance paste with a square resistance coefficient of 10KΩ is selected, and the film thickness is 5-10 microns. The insulatin...

Embodiment 2

[0046] Figure 14 ~ Figure 20 It is a schematic diagram of Embodiment 2 of the present invention. This embodiment consists of four resistors to form a Wheatstone bridge, which is a full-bridge strain gauge and is mainly used for pressure sensors.

[0047] Such as Figure 14 ~ Figure 20 As shown, similar to Embodiment 1, the upper surface of the ceramic substrate 401 is printed and sintered to form a conductor layer 402, a thick film resistance layer 403, and an insulating protective layer 404, and then the sealing glass paste is printed on the lower surface of the ceramic substrate 401. material, dried or sintered to form the sealing glass layer 405. The difference from the first embodiment is that, in the second embodiment, the thick film resistor layer 403 is a Wheatstone bridge composed of four resistors.

[0048] To sum up, the present invention uses ceramics as the base material. Ceramics have the characteristics of corrosion resistance, high temperature resistance, low...

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Abstract

The invention provides a piezoresistive strain gauge with a ceramic substrate. The piezoresistive strain gauge comprises a ceramic substrate, a conductor layer, a resistive layer with a piezoresitive effect, an insulation protective layer and a seal glass layer, wherein the conductor layer and the resistive layer are manufactured on the upper surface of the ceramic substrate, the insulation protective layer covers on the upper parts of the conductor layer and the resistive layer, and the seal glass layer is manufactured on the lower surface of the ceramic substrate. The piezoresistive strain gauge disclosed by the invention can be used to manufacture high-temperature-resistant and corrosion-resistant force sensors for weighing, pressure and the like, and is high in precision, good in stability and long in service life.

Description

technical field [0001] The invention relates to a strain gauge for manufacturing a force-sensitive sensor, in particular to a piezoresistive strain gauge with a ceramic substrate. Background technique [0002] The strain gauge force sensor is formed by pasting the strain gauge on the sensor elastic body, such as weighing, acceleration and pressure sensors. The performance of the strain gauge directly determines the performance of this type of sensor. [0003] Such as Figure 1 to Figure 6 As shown, a traditional strain gauge is composed of a substrate 101 , a resistance sensitive gate 102 and an insulating protection layer 103 . The function of the substrate 101 is to fix the resistance sensitive grid 102 so that it maintains a certain geometric shape, and also plays an insulating role. The base 101 is usually made of flexible materials such as epoxy, acetal, and polyimide. The resistance sensitive grid 102 is made of an alloy foil, which is combined with the substrate 101...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/16G01L1/22
Inventor 周敬训
Owner ADVANCED PLATINUM TECH
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