Method of probe and lead foot automatic aiming and probe station testing system thereof

Abstract

The invention discloses a method of probe and lead foot automatic aiming. Automatic aiming of the testing probe and the lead foot are achieved through six steps. The invention further discloses a probe station testing system of the probe and lead foot automatic aiming. The probe station testing system of the probe and lead foot automatic aiming comprises a movable probe displacement device, a probe frame, a probe, a fixture, a sample displacement device, a controlling device, a machinery supporting device, a signal transmission device and a power supply device. The probe frame and the probe are installed on the probe displacement device. The fixture is movable and is used for fixing a to-be tested device and a wafer. The controlling device is capable of setting up procedures of all the devices. The method of the probe and the lead foot automatic aiming and the probe station testing system of the probe and lead foot automatic aiming are low in cost and good in generality. The method of the probe and the lead foot automatic aiming and the probe station testing system of the probe and lead foot automatic aiming can test efficiently under the condition without damaging the to-be tested device and the wafer in short time. The method of the probe and the lead foot automatic aiming and the probe station testing system of the probe and lead foot automatic aiming can be applied widely in the survey of precise electricity of complex and high speed devices. Reliability of testing signal quality and testing results can be guaranteed. Testing time is shortened and cost of device manufacturing technology is reduced.

Description

technical field [0001] The invention relates to an automatic alignment method of semiconductor chip automatic test equipment, in particular to a method for automatic alignment of probes and pins and a probe station testing system thereof. It belongs to the field of testing equipment. Background technique [0002] In the electrical performance test of electronic devices, the electrical connection between the device pins and the test equipment needs to be realized through probes. In the semiconductor and optoelectronic industries that pursue miniaturization, it is difficult to Accurately touch the probes to the pins. For this reason, special probe station equipment has appeared in the field of test equipment, which is widely used in the research and development of precision electrical measurements of complex and high-speed devices, aiming to ensure quality and reliability, and reduce development time and device manufacturing costs. The core function of the probe station is t...

AI Technical Summary

Problems solved by technology

However, this technology does not provide the first self-alignment method for locating the device's pins with the probes

Therefore, this invention cannot realize true automatic alignment, and cannot eliminate the need for visual inspection by the operator through an automated device, so that the spatial positions and distances of the pins of the device under test and the test probes are aligned with each other

[0007] Therefore, those skilled in the art are devoting themselves to developing a method for aligning probes and DUT pins to solve the problems of low efficiency of manual alignment, inapplicability to fields that require batch testing, insufficient combination, and low reliability of data And other issues

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