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Nanoimprint machine and pressurizing method thereof

An imprinter and nanotechnology, applied in optomechanical equipment, optics, instruments, etc., can solve the problems of uneven pressure distribution and poor adaptability, and achieve the effect of uniform pressure distribution

Active Publication Date: 2013-06-12
无锡市正先自动化设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The difficulty of nanoimprinting technology lies in providing nanoscale flattening devices, and the most reasonable driving method and operability. At present, traditional nanoimprinting machines generally have uneven pressure distribution and can only perform one form of solidification. Disadvantages of poor adaptability

Method used

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  • Nanoimprint machine and pressurizing method thereof

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Embodiment Construction

[0020] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0021] see figure 1 as shown, figure 1 It is a schematic structural diagram of the nanoimprint machine provided in Embodiment 1 of the present invention.

[0022] In this embodiment, a nanoimprinting machine includes a vacuum chamber 1, a pressure-bearing platform 2 is provided at the bottom of the vacuum chamber 1, and the pressure-bearing platform 2 is made of any one of stainless steel or quartz glass, and The pressure-bearing platform 2 is provided with an electric heating furnace 3 with a built-in water-cooling circulation system, and its bottom is provided with an ultraviolet light source 4 with a wavelength of 375nm. According to different experimental requirements, either thermosetting or ultraviolet curing can be selected. A forming method, a pressure plate 5 is arranged above the pressur...

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Abstract

The invention discloses a nanoimprint machine and a pressurizing method thereof. The nanoimprint machine comprises a vacuum chamber, a drive unit, a pressurizing disc, a bearing platform and a curing forming device, the bearing platform is arranged at the bottom in the vacuum chamber, the pressurizing disc is arranged above the bearing platform in the vacuum chamber and is connected with the drive unit, the drive unit comprises a direct-driven servo electric cylinder composed of a servo motor and a ball screw, a high-sensitivity pressure sensor is arranged in the cylinder body of the servo electric cylinder, the pressurizing disc comprises an upper pressurizing disc and a lower pressurizing disc, the upper pressurizing disc is connected with the ball screw, rolling friction balls are arranged between the upper pressurizing disc and the lower pressurizing disc, the bearing platform is provided with a heater, and the bottom of the bearing platform is provided with an ultraviolet light source. The nanoimprint machine has the advantages of uniform pressure distribution, self control and arrangement of an imprint pressure, a dwelling time and an imprint speed, and suitableness for the thermocuring formation and ultraviolet curing formation.

Description

technical field [0001] The invention relates to the technical field of processing nanoscale structures and devices, in particular to a nanoimprinting machine and a pressurizing method thereof. Background technique [0002] "Nanoimprinting" is a new method of nano-pattern replication. In nanoimprinting, the imprinting mold is the template for nanoimprinting. The size of the convex-concave structure is on the order of nanometers. The nanostructures are shaped by methods such as cooling or ultraviolet exposure, after which the template is removed, and the nanostructures are transferred to the semiconductor silicon wafer by other processes. This process is called nanoimprinting. The difficulty of nanoimprinting technology lies in providing nanoscale flattening devices, and the most reasonable driving method and operability. At present, traditional nanoimprinting machines generally have uneven pressure distribution and can only perform one form of solidification. The disadvant...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
Inventor 唐瑞荪
Owner 无锡市正先自动化设备有限公司
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