5results about How to "Fast boost" patented technology

The utility model discloses an electromagnetic pulse valve, relates to gas circuit valve technical field, the electromagnetic pulse valve includes valve body, bonnet, diaphragm and control solenoid valve, bonnet is fixed on the valve body, the diaphragm floats between the bonnet and the valve body, forms the rear air chamber between the diaphragm and the bonnet, and the control solenoid valve is fixed on the valve body. A front air chamber is formed between the diaphragm and the valve body, and the diaphragm seals and separates the front air chamber and the rear air chamber; the valve body is provided with an air inlet and an air outlet, the air inlet is communicated with the front air chamber, and the diaphragm is provided with a valve pad used for sealing the air outlet; an air inlet of the control electromagnetic valve is communicated with an air source, and an air outlet of the control electromagnetic valve is communicated with the rear air chamber. The electromagnetic valve has the advantages of being capable of avoiding pollution and harm caused by leakage of gas in the valve, high in closing response speed, low in power needed by the coil, simple in structure, convenient to produce and the like.

The application belongs to the technical field of heat supply control application, and particularly discloses a multi-variable heat supply optimization control system for a desuperheater and pressure reducer set based on load prediction technology, which comprises a desuperheating and pressure reducing control module, a desuperheater and a pressure reducer, the desuperheating and pressure reducing control module is connected with the desuperheater and the pressure reducer, the desuperheating and pressure reducing control module is composed of a target load prediction optimization algorithm unit, a data relay unit, an artificial intervention target meeting input unit, a multi-variable fuzzy decoupling controller and a Kalman filter.The application has the beneficial effect that the system can design a multi-variable dynamic decoupling module according to the mutual coupling relationship between temperature and pressure, eliminate the coupling influence between the temperature regulation loop and the pressure regulation loop, and when the system needs to quickly increase the load, give a larger opening degree instruction to the pressure regulating door and the temperature regulating door, so that the system can quickly increase the pressure while maintaining the temperature stable, and when the system flow is close to the flow set value, switch to the steady-state controller for flow control.

The invention discloses a load detection circuit comprising a first detection port used for receiving a detection current and used for being coupled with a first end of a load, and the first end of the load has a first potential; the first end of the first resistor receives the detection current; the first end of the first switch is coupled with the second end of the first resistor; the second detection port is coupled with the second end of the first switch and is used for being coupled with the second end of a load, and the second end of the load has a second potential; when the first switch is closed, the first potential and the second potential are both related to the detection current and the first resistor; when the load is short-circuited, the difference value between the first potential and the second potential is smaller than a first preset value, and when the load is open, the difference value between the first potential and the second potential is larger than a second preset value; wherein the first current value is greater than the second current value. According to the invention, the difference value between the first potential and the second potential can be quickly established, so that boosting is realized, and the voltage establishment time is shortened. The state of the load is then determined from the voltage value of the load.

The invention discloses a liquid supply pressure regulating system which comprises a liquid supply part. One end of the liquid outlet pipeline is communicated with the liquid supply part, and the other end of the liquid outlet pipeline is a liquid outlet; the high-pressure pump is arranged on the liquid outlet pipeline so as to control the pressure of liquid in the liquid outlet pipeline; the pressure adjusting device is arranged on the liquid outlet pipeline in a communicating mode and arranged between the high-pressure pump and the liquid outlet, the pressure adjusting device is provided with an adjusting opening, and the adjusting opening is used for discharging liquid in the pressure adjusting device so as to adjust the pressure of the liquid; the control piece is arranged on the pressure adjusting device so as to control the opening degree of the adjusting opening. On the premise that the liquid outlet is closed, the pressure of the high-pressure chemical liquid in the liquid supply pressure regulating system can be automatically increased or decreased, when the valve needs to be opened for liquid outlet work, the pressure is adjusted, and the purpose of not influencing the productivity is achieved.

The application discloses a semiconductor processing device, a pressure control method and an opening degree valve. The semiconductor processing device divides a process cavity into a first cavity (a substrate processing area) and a second cavity (a pre-evacuation area) through a cross section control part, and the cross section control part can adjust the size of a flow cross section between the two cavities. The pressure control method is as follows: a vacuum pump continuously evacuates the second cavity; when the pressure is increased, the flow cross section is reduced (and is kept greater than zero), so that low-pressure process gas of a previous stage is smoothly discharged, and meanwhile, the first cavity is increased in pressure, and the second cavity forms a low-pressure area; when the pressure is decreased, the flow cross section is increased, and the pressure decrease of the first cavity is realized by utilizing the pressure difference between the two cavities. The opening degree valve adopts a structure in which a baffle and a coaxial rotating shielding piece are matched, and only directional rotation is needed to realize the switching of the opening degree. The scheme improves the pressure switching speed and is suitable for semiconductor processes which need frequent and rapid pressure adjustment.