Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology

A contact type, optical fiber fusion splicer technology, applied in the coupling of optical waveguides, the use of optical devices, measuring devices, etc., can solve the problems of inability to meet the three-dimensional micro-nano measurement technology, unfavorable for mass production, complex preparation methods, etc. Small diameter, improved measurement capability, simple preparation effect

Active Publication Date: 2013-07-10
HEFEI UNIV OF TECH
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Problems solved by technology

The microprobes prepared by existing processing methods have disadvantages such as large volume, complicated preparation methods, and h

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  • Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology
  • Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology
  • Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology

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[0021] A preparation method of a contact optical fiber microprobe based on optical fiber tapering technology. A contact optical fiber microprobe is prepared by selecting a single-mode fiber material. The optical fiber is accurately placed in the V-shaped positioning groove of the optical fiber fusion splicer, so that the tapered single-mode optical fiber is placed in the discharge area of ​​the optical fiber fusion splicer, and the electric spark discharge of the optical fiber fusion splicer is used to control the taper. The single-mode fiber is preliminarily fired and optimized for the tapered part. During the whole firing process, the tapered single-mode fiber is rotated to overcome the influence of gravity, so that the end of the single-mode fiber after the tapered A micro-probe with small diameter, good sphericity, and small eccentricity is obtained. The contact-type optical fiber micro-probe is composed of the micro-probe and the tapered single-mode optical fiber. At the s...

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Abstract

The invention discloses a preparation method of a contact-type optical fiber micro probe based on an optical fiber tapering technology. Through the optical fiber tapering technology, the diameter of a single mode fiber is attenuated to be in a range of less than 40 micrometers. Then, the single mode fiber after being attenuated is accurately put into a V-type groove in an optical fiber welding machine, and at the same time, the tapered portion of the optical fiber is placed on a discharging region of the optical fiber welding machine. The tapered portion of the optical fiber is heated and fired through the optical fiber welding machine, and the optical fiber is evenly rotated until the end of a tapering optical fiber is melted to be a high-quality micro probe ball. In the process of firing of the optical fiber, process control parameters of the optical fiber welding machine are reasonably arranged based on a taguchi method, the optical fiber is rotated to overcome the impact caused by gravity, and accordingly the micro probe ball which is small in ball diameter, good in sphericity and small in eccentricity is obtained on the end portion of the tapering optical fiber. The micro probe ball and the tapering optical fiber form the contact-type optical fiber probe.

Description

technical field [0001] The invention relates to the field of preparation methods of optical fiber probes, in particular to a preparation method of contact-type optical fiber micro-probes based on optical fiber taper technology. Background technique [0002] With the development of micromachining technology, MEMS devices, ultra-precision mechanical parts, and high-precision optical components are more and more widely used, and the accurate measurement of their three-dimensional contours is becoming more and more urgent. Because the structure of these devices has the characteristics of small lateral size but large aspect ratio and high processing precision, it is necessary to research and develop micro-nano three-dimensional coordinate measuring machines and related technologies that can precisely measure the three-dimensional contours of these devices, including micro The preparation method and preparation technology of the contact microprobe for probing the ball. [0003] T...

Claims

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Application Information

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IPC IPC(8): G02B6/255G01B11/24
Inventor 黄强先赵剑史科迪李志渤蔡学超余惠娟
Owner HEFEI UNIV OF TECH
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