Beam cluster parameter measuring system for low-energy heavy ions and frequency resonance energy selection energy measuring method
A measurement system and parameter measurement technology, which is applied in the field of beam parameter measurement of low-energy heavy ions, can solve the problems of low energy dispersion measurement resolution of low-energy heavy ion sources, space charge effect beam cluster dispersion, etc., and achieve beam saving Longitudinal transmission space of clusters, the effect of reducing cluster performance, and the effect of high resolution
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Embodiment 1
[0034] Embodiment 1 energy divergence measurement
[0035] Adjust the electrode spacing of the front and rear plate excitation electrodes 23, 24 to the 5mm range, adjust the measurement probe 2 in the vacuum to a suitable position through the stepping motor drive platform 1, and make the bunches without any excitation power The efficiency of selecting the slits 21 and 22 through the front and rear positions is the highest, that is, the reading of the Faraday cup 25 is the largest; then the external excitation source 4 is switched to the frequency sweep excitation source 41, and now the frequency sweep excitation source 41 sends a peak voltage of 150V. Sweep the excitation power, and make the excitation signals applied on the front and rear plate excitation electrodes 23, 24 reverse phase through wiring.
[0036] figure 2 It is a schematic diagram of the results of the finite element simulation of the ion flight trajectory with ideal energy and a certain energy deviation when...
Embodiment 2
[0043] Embodiment 2 Emissivity measurement
[0044] Drive the platform 1 by the stepping motor to adjust the measuring probe 2 in the vacuum to a proper position. Without any excitation power, the efficiency of the bunches passing through the front and rear position selection slits 21 and 22 is the lowest at this time, that is, the Faraday cage 25, the reading is the smallest, and at the same time, record the approximate center position of the bunch at this time; then switch the external excitation source 4 to a triangular wave excitation source 42, and at this time, the excitation signals added on the front and rear plate excitation electrodes 23 and 24 are in phase. Obviously, the working state of the system at this time is equivalent to the Alison electrical deflection emittance measurement device described in the literature of P.W.Allison et al. Under a certain scanning voltage, the selection condition that ions can pass through the rear position selection slit 22 is that ...
Embodiment 3
[0058] Embodiment 3 Ion ratio measurement:
[0059] For ion ratio measurements, the basic principle is close to that of energy spread measurements. When energy divergence is measured, the excitation frequency with the maximum passing probability corresponds to D + Time-of-flight of ions in the electrode, for a D of 70keV + For ions, the excitation frequency with maximum pass probability is 25.8 MHz. When ion ratio measurement, such as D 2 + measurement due to its relationship with D + The ions have the same longitudinal energy but double the mass, and their β value is 0.0061, so the excitation frequency with the maximum passing probability is 18.3MHz. Figure 5 for D 2 + The simulation results show that the frequency difference caused by different mass numbers is far greater than the frequency dispersion caused by the energy divergence, and the charges collected by the Faraday cup 25 do not interfere with each other in the two frequency bands during the frequency sweep....
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