Device and adjustment method for synchronous monitoring of pump spot and sample surface microstructure

Abstract

The invention relates to a device for synchronously monitoring pumping facula and a sample surface microstructure and an adjusting method. The device comprises a laser source, an isolator, a lens, a rotary base, a splitting slice, an attenuation slice, a CCD (Charge Coupled Device) image sensor, a sample stage, a two-dimensional step motor, a first reflector, a second reflector, a third reflector and an optical garbage can, wherein the splitting slice is fixed on the rotary base, and the sample stage is fixed on the two-dimensional step motor; the laser emitted by the laser source sequentially passes by the isolator, the lens and the splitting slice along the horizontal direction to focus on the sample stage, the attenuation slice and the CCD image sensor are sequentially arranged in a direction vertical to the laser below the splitting slice, the laser vertically passes by the first reflector, the second reflector and the third reflector upwards in sequence after being reflected by the splitting slice and is reflected to the back surface of the sample, and the optical garbage can is a movable element and is used for shielding the light path. The optical garbage is moved and the direction of the splitting slice is adjusted to monitor the pumping facula and reflection and transmission type sample surface microstructures, the structure is simple and the operation is easy.

Description

technical field [0001] The invention relates to a process monitoring technology, in particular to a device and an adjustment method for synchronously monitoring the pump spot and the microstructure of the sample surface. Background technique [0002] Microstructured materials are materials that have micron-scale quasi-peak structures on the surface of the material through chemical and physical means. This kind of microstructured material is widely used in optical and physical properties such as high absorption and good response to infrared bands. Energy, sensors, etc. The preparation and research of microstructure materials has become the focus of common attention of scholars in many disciplines such as physics, chemistry, and electronics. This kind of surface microstructure material has important potential application value in the fields of remote sensing, optical communication, solar cells, infrared sensors and microelectronics. The preparation of microstructure material...

AI Technical Summary

Problems solved by technology

[0006] The present invention is aimed at the problem that the system for preparing surface microstructure materials is too simple, and it is very cumbersome if the production control needs to observe the pump spot and the sample surface microstructure, and proposes a device for synchronously monitoring the pump spot and the sample surface microstructure. The adjustment method uses a CCD, a beam splitter with a rotating base and three mirrors. By adjusting the rotating beam splitter, the monitoring of the pump spot and the monitoring of the reflective and transmissive material surface microstructure experimental devices can be realized. Quick and easy conversion

Images