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Opto-mechanical separation type dual-cavity excimer laser frame system

A technology of excimer laser and frame system, applied in laser parts and other directions, can solve the problems of difficulty in the design and integration of the whole machine structure system, and achieve the effect of reducing the impact

Inactive Publication Date: 2016-05-04
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

This creates difficulties for the design integration of the whole machine structure system

Method used

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  • Opto-mechanical separation type dual-cavity excimer laser frame system
  • Opto-mechanical separation type dual-cavity excimer laser frame system
  • Opto-mechanical separation type dual-cavity excimer laser frame system

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Embodiment Construction

[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0033] 1. Structural layout of the whole frame system for dual-cavity excimer lasers

[0034] The frame system for the double-cavity excimer laser of the present invention is applicable to the double-cavity excimer laser, and the double-cavity excimer laser includes a main oscillation discharge cavity and a power amplification cavity, and also includes a cavity related to the two cavities. Functional module components, such as the front-end output optical module of each cavity, the pulse compressor, the back-end reflection module of the power amplification cavity, the back-end line width narrowing module of the main oscillation cavity, etc. In addition, the dual-cavity excimer laser also includes a system controller for c...

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Abstract

The invention discloses a double-cavity excimer laser device complete-device frame system. A double-cavity excimer laser device comprises a main oscillation discharging cavity, a power amplification cavity and an optical system relevant to the two cavities. The double-cavity excimer laser device complete-device frame system comprises an installation base (1), a foundational frame (2), an optical system frame (3) and a discharging cavity frame (4), wherein the installation base (1) is a base of the complete-device frame system and used for bearing all components of the complete-device frame system, the foundational frame (2) is directly and fixedly installed on the installation base (1), the optical system frame (3) is used for installation of the optical system and separated from the discharging cavity frame (4), and the discharging cavity frame (4) is installed on the installation base (1) and used for bearing the main oscillation discharging cavity and the power amplification cavity. The double-cavity excimer laser device complete-device frame system can reduce influences of the discharging cavity on the optical system.

Description

technical field [0001] The invention relates to a double-cavity excimer laser frame system, which is suitable for the assembly and integration of the double-cavity excimer laser. Background technique [0002] Excimer laser is a conventional gas laser for ultraviolet characteristic applications. It is currently considered to be the best laser light source for lithography and the main working light source for integrated circuit lithography lithography industry. [0003] Traditional excimer lasers are designed with a single-cavity structure consisting of a single gas discharge module. With the further development of optical lithography technology, laser sources are required to have narrower spectral width (linewidth) and higher power. [0004] In order to narrow the spectral width and increase the laser power at the same time, the dual-cavity structure based on the main oscillator-power amplification technology is introduced into the design of the laser. The basic idea of ​​t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/02
Inventor 丁金滨齐威刘斌沙鹏飞周翊王宇赵江山
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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