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Ferromagnetic material sputtering target

A sputtering target and strong magnetic technology, applied in the application of magnetic layer, magnetic film to substrate, sputtering coating, etc., can solve the problem of insufficient increase in leakage flux, and achieve low replacement frequency and low manufacturing. , low cost effect

Inactive Publication Date: 2013-08-21
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such a structure may not sufficiently increase the leakage flux due to the content of constituent elements such as Co and Cr, so it cannot be said to be a suitable sputtering target for magnetic recording media.

Method used

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  • Ferromagnetic material sputtering target
  • Ferromagnetic material sputtering target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0075] (Example 1, Comparative Example 1)

[0076] In Example 1, Co powder with an average particle size of 3 μm, Cr powder with an average particle size of 6 μm, Pt powder with an average particle size of 3 μm, CoO powder with an average particle size of 2 μm, and SiO powder with an average particle size of 1 μm were prepared as raw material powders. 2 Powder, Co-45Ru (mol%) powder with a diameter in the range of 50-150 μm.

[0077] 33.46% by weight of Co powder, 2.83% by weight of Cr powder, 31.86% by weight of Pt powder, 4.64% by weight of CoO powder, SiO 2 Weight ratio of powder 5.20 wt%, Co-Ru powder 22.01 wt% These powders were weighed so that the composition of the target was 88(Co-5Cr-15Pt-9Ru)-5CoO-7SiO 2 (mol%).

[0078] Then, Co powder, Cr powder, Pt powder and SiO 2 The powder was sealed in a 10-liter ball mill jar together with zirconia balls as a grinding medium, and mixed by rotating for 20 hours. The resulting mixed powder and Co-Ru powder were mixed for 10...

Embodiment 2）

[0090] In Example 2, Co powder with an average particle size of 3 μm, Cr powder with an average particle size of 6 μm, CoO powder with an average particle size of 2 μm, and SiO powder with an average particle size of 1 μm were prepared as raw material powders. 2 Powder, Co-45Ru (mol%) powder with a diameter in the range of 50-150 μm.

[0091] 55.40% by weight of Co powder, 3.64% by weight of Cr powder, 5.96% by weight of CoO powder, SiO 2 Powder 6.69% by weight, Co-Ru powder 28.30% by weight The powders were weighed so that the composition of the target was 88(Co-5Cr-9Ru)-5CoO-7SiO 2 (mol%).

[0092] Then, Co powder, Cr powder, CoO powder and SiO 2 The powder was sealed in a 10-liter ball mill jar together with zirconia balls as a grinding medium, and mixed by rotating for 20 hours. The resulting mixed powder and Co-Ru powder were mixed for 10 minutes in a planetary motion mixer with a ball capacity of about 7 liters.

[0093] This mixed powder was filled in a carbon mold,...

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Abstract

Provided is a ferromagnetic material sputtering target that: is a sputtering target comprising a metal with a composition including Cr at 20 mol % max., Ru at 0.5-30 mol %, and Co as the remainder; and is characterized by the target structure having a metal matrix (A) and a Co-Ru alloy phase (B) in the metal matrix (A) that contains 35 mol % or more Ru. A ferromagnetic material sputtering target capable of improving leakage magnetic flux and stable discharge with a magnetron sputtering device is obtained.

Description

technical field [0001] The invention relates to a magnetic thin film of a magnetic recording medium, especially a sputtering target of a ferromagnetic material used in the film formation of a magnetic recording layer of a hard disk using a perpendicular magnetic recording method. A non-magnetic material particle-dispersed ferromagnetic material sputtering target capable of obtaining a stable discharge during sputtering. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films that perform recording. For example, a Co—Cr type or Co—Cr—Pt type ferromagnetic alloy containing Co as a main component is used for the recording layer of a hard disk employing an in-plane magnetic recording method. [0003] In addition, in the recording layer of a hard disk adopting the perpendicular magnetic recording system that has been put into p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06C23C14/14G11B5/851H01F10/16H01F41/18
CPCC23C14/3414G11B5/851H01F41/183
Inventor 荒川笃俊池田祐希
Owner JX NIPPON MINING & METALS CORP
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