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Induction heating device, induction heating method, and program

An induction heating device and induction heating technology are applied in induction heating, induction heating control, electric heating devices, etc., which can solve the problems of increased conduction loss of switching elements, and achieve the effect of reducing surge voltage and reducing switching loss

Active Publication Date: 2013-08-21
株式会社三井E&S
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

It is described that the resonant inverter circuit in the resonant current phase lead mode is turned on by zero-current switching operation, and the reverse recovery operation of the rectifier diode is accompanied by the conduction of the switching element, so the current flowing through the switching element is divided by the resonant current In addition, the reverse recovery current of the rectifier diode is superimposed, and as a result, the conduction loss of the switching element increases

Method used

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  • Induction heating device, induction heating method, and program
  • Induction heating device, induction heating method, and program
  • Induction heating device, induction heating method, and program

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no. 1 Embodiment approach ）

[0037] use figure 1 and figure 2 , the structure of the induction heating device of the present invention will be described.

[0038] exist figure 1 Among them, the induction heating device 100 is provided with a step-down chopper 10, a plurality of inversion devices 30, 31, ..., 35, a plurality of induction heating coils 20, 21, ..., 25, and a control circuit 15, and each induction heating coil 20, 21, ..., 25 generate high-frequency magnetic flux in a common heating element (for example, carbon graphite) ( figure 2 ) flows through the eddy current to make the heating element generate heat.

[0039] In addition, the induction heating device 100 is controlled so that the current phases and frequencies of all the induction heating coils 20 , 21 , . Because the current phases of the induction heating coils 20, 21, . will not decrease. As a result, temperature unevenness does not occur on the surface of the object to be heated.

[0040] In addition, in order to reduce th...

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Abstract

The purpose of the present invention is to minimize switching losses of an inverse conversion device. An induction heating device comprises: a plurality of induction heating coils (20) which are positioned in close proximity; a plurality of inverse conversion devices (30) which convert DC voltage into square wave voltage, said devices further comprising capacitors (40) which are serially connected to each of the induction heating coils (20); and a control circuit (15) which controls so as to align the phases of the coil currents which flow through the plurality of induction heating coils (20). The control circuit (15) controls the timing at which the square wave voltage transitions such that an instantaneous value of the square wave voltage when the coil voltage zero-crosses is preserved in either DC voltage or turnover voltage.

Description

technical field [0001] The present invention relates to an induction heating device, an induction heating method, and a program using a plurality of induction heating coils. Background technique [0002] A semiconductor manufacturing device that heat-treats a wafer needs to control the temperature difference between the surface of the wafer as small as possible (for example, within ±1° C.) due to problems such as thermal deformation. In addition, the temperature needs to be raised rapidly (for example, 100° C. / second) to a desired high temperature (for example, 1350° C.). Therefore, there is known an induction heating device in which an induction heating coil is divided into a plurality, and a high-frequency power supply (for example, an inverter) is individually connected to each of the divided induction heating coils to perform power control. However, since the divided induction heating coils are close to each other, there is a mutual inductance M, and a mutual voltage is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B6/44
CPCH05B6/06H05B6/44H05B6/062H05B6/04H05B6/08
Inventor 内田直喜冈崎良弘尾崎一博
Owner 株式会社三井E&S
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