A macro-micro-driven linear piezoelectric motor and its driving method

Abstract

The invention discloses a macro and micro-driving type linear piezoelectric motor and a driving method thereof, and relates to the field of the ultrasonic motor and micro driving. The motor comprises a rack, a driving vibrator, an active cell and a pre-tightening mechanism, wherein the driving vibrator comprises a metallic elastomer, a micrometric displacement amplification elastomer and a piezoelectric element; the two symmetrical convex teeth on the inner side of the micrometric displacement amplification elastomer are in frictional contact with the active cell; and the piezoelectric element is polarized along the thickness direction. The motor macro driving method is characterized in that two longitudinal standing waves of which the phase difference is 90 degrees, the frequencies are closed, and the type are the same are stimulated by the vibrator under the action of the alternating current of which the phase difference is 90 degrees; after the standing waves are combined, an elliptic movement locus is formed on the convex tooth part; and under the pre-tightening force action, the active cell generates the macro linear movement. According to the micro-driving method, direct-current high voltage is applied to the piezoelectric element, the vibrator generates static deformation, and the two symmetrical convex teeth on the inner side of the micrometric displacement amplification elastomer clamp the active cell and the micro linear movement is generated. According to the invention, the macro driving and the micro driving are simultaneously realized on one motor, and the invention has the characteristics of simple structure and reliability in working.

Description

Technical field [0001] The invention relates to the field of motor research, in particular to a macro and micro drive type linear piezoelectric motor and a driving method thereof. Background technique [0002] With the rapid progress of IC manufacturing process and the market’s urgent demand for tiny chips, chip integration is increasing, I / O density is getting higher and higher, chip size, chip lead pitch and pad diameter continue to decrease, and the chip packaging industry The rapid development has placed extremely high requirements on the positioning accuracy, movement speed and acceleration of the packaging equipment. However, the improvement of positioning accuracy and movement speed are contradictory. The increase of movement speed and acceleration increases the inertial force of the mechanism and the frequency of inertial force changes. The system is prone to elastic deformation and vibration, which will damage the mechanism. The accuracy of the movement increases the es...

AI Technical Summary

Problems solved by technology

[0003] Due to its small size, high displacement resolution, fast response speed, large output force, and high energy conversion efficiency, the piezoelectric ceramic drive has become an ideal drive element for precise positioning, but its stroke is only tens of microns, so its application range restricted

[0004] At present, there is a concept of macro-micro drive in the existing technology, that is, on one motor, large-stroke high-speed movement and high-resolution precision movement can be realized at the same time, but this concept cannot be accurately realized in practical applications.

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