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Bionic flexible dry electrode and manufacturing method thereof

A manufacturing method and technology of dry electrodes, which are used in medical science, sensors, diagnostic recording/measurement, etc., can solve problems such as poor contact, monitoring of electrode discomfort, and large size of dry electrodes, and achieve outstanding performance, increased fit, and structure. clever effect

Inactive Publication Date: 2013-10-02
无锡交大联云科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the dry electrode prepared by this method has a large volume, and it does not have good contact with the skin when used, and it needs tools such as adhesive tape to fix it on the skin. Larger motion artifacts are introduced into the signal, and this electrode discomfort is not compatible with long-term monitoring of electrophysiological signals

Method used

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  • Bionic flexible dry electrode and manufacturing method thereof
  • Bionic flexible dry electrode and manufacturing method thereof
  • Bionic flexible dry electrode and manufacturing method thereof

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Embodiment Construction

[0030] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

[0031] Preparation of PDMS molds:

[0032] Clean the silicon wafer with oxygen plasma, and form an oxide layer on the silicon wafer by CVD; spin-coat positive photoresist on the silicon wafer oxide layer, expose, develop, and pattern the photoresist layer; use CF4 reactive ion etching on the silicon wafer The places not covered with photoresist form the second level structure 4 of the mold. Such as Figure 1a shown.

[0033] Clean off residual photoresist. Spin-coat positive photoresist on the silicon wafer, expose, develop, and pattern the photoresist layer; use ...

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Abstract

The invention discloses a bionic flexible dry electrode which comprises a conductive bionic electrode sheet and an external interface. A bristle structure imitating a gecko is arranged on the surface of the conductive bionic electrode sheet. The bionic flexible dry electrode is of a structure of three levels. The first level and the second level of the electrode sheet are prepared through the micro-reversed mold technology. A mold of a two-level structure is prepared through a PDMS. A mixture CPDMS of the PDMS and a CNT is filled into the mold. After the CPDMS is solidified, a film provided with the two-level structure and prepared by the CPDMS is taken down. Then, the third level is formed on the second level of the film of the two-level structure through the inkin technology. The micro-machining process technology is adopted to manufacture the dry electrode, so that the dry electrode has viscidity and flexibility and can be directly adhered to the skin of a user without harm to the skin of the user. The dry electrode can be better in contact with the skin so that the stability of a signal and the comfort of the user can be improved. After the bionic flexible dry electrode is disinfected and cleaned, the viscidity of the bionic flexible dry electrode is not influenced, so that the bionic flexible dry electrode is reusable and has the advantages of environment friendliness. Compared with an existing dry electrode, the bionic flexible dry electrode is obvious in performance and ingenious in structure.

Description

technical field [0001] The invention relates to an electrode for measuring electrophysiological signals in the medical field, in particular to a bionic flexible dry electrode prepared by a micromachining process. Background technique [0002] With the improvement of living standards, people pay more and more attention to their health status, and the electrophysiological signals of the human body can reflect the health status of the human body, so long-term monitoring of electrophysiological signals is also particularly important. Electrophysiological signals include: EEG signals, ECG signals, myoelectric signals, oculoelectric signals, etc. Wet electrodes are commonly used in medicine to collect electrophysiological signals. Wet electrodes also need to be used with conductive glue during use. Since the conductive glue is easy to dry out, it will cause the attenuation of the collected signal, which is very unfavorable for long-term monitoring of electrophysiological signals....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/0408A61B5/0478A61B5/0492A61B5/0496A61B5/296
Inventor 刘景全彭慧玲王龙飞杨斌朱红英杨春生
Owner 无锡交大联云科技有限公司
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