Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method
A power sensor, thermoelectric technology, applied in the direction of power oscillators, electrical components, etc., can solve the problems of large size, complex circuit structure, etc., and achieve the effect of easy integration, high precision, and novel structure
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[0042] The present invention will be further explained below in conjunction with the drawings.
[0043] Such as figure 1 As shown, a frequency doubler based on a micromechanical indirect thermoelectric power sensor proposed by the present invention includes a substrate made of gallium arsenide (GaAs), a power combiner and a MEMS indirect A microwave power sensor, an external voltage-controlled oscillator and a divider, define an axis of symmetry on the substrate 1, such as figure 2 Shown.
[0044] The power combiner forms a symmetrical structure along the axis of symmetry, including a ground wire 2, a coplanar waveguide transmission line 3, two asymmetric coplanar strip lines 4, an isolation resistor 5, two sets of fixed beams 12 and an anchor zone 13; The function of is to vector synthesize the reference signal and the signal output by the divider (÷N) feedback loop. There is a phase difference between the two microwave signals for vector synthesis, and the power of the synthes...
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