Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method

Abstract

The invention discloses a frequency multiplier based on a micromachine indirect thermoelectric type power sensor and a manufacturing method. The frequency multiplier comprises a substrate, a power combiner, an MEMS indirect type microwave power sensor, an external voltage-controlled oscillator and an external divider, wherein the substrate is made of gallium arsenide, and the power combiner and the MEMS indirect type microwave power sensor are installed on the substrate. An output signal of the voltage-controlled oscillator passes through the divider and then is fed back to an input end of the power combiner, a reference signal is applied to another input end of the voltage-controlled oscillator and is detected by the indirect thermoelectric type power sensor, and a voltage is obtained, wherein a ratio is formed between the voltage and a phase difference of the reference signal and the output signal of the voltage-controlled oscillator. The voltage is applied to the input end of the voltage-controlled oscillator, and the local oscillator signal frequency of the voltage-controlled oscillator changes along with changes of the voltage. On the basis, the invention further discloses a manufacturing method of the frequency multiplier based on the micromachine indirect thermoelectric type power sensor. The frequency multiplier is simple in structure, smaller in size, higher in precision, and good in practicability.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems (MEMS), in particular to a frequency multiplier based on a micro-mechanical indirect thermoelectric power sensor. Background technique [0002] A frequency multiplier is a circuit that makes the output signal frequency equal to an integer multiple of the input signal frequency. A frequency multiplier can be formed by using a nonlinear circuit to generate higher harmonics or using a frequency control loop. A frequency multiplier can also consist of a voltage-controlled oscillator and control loop. Frequency multipliers are used in many fields, such as wireless communication, radar, digital TV, broadcasting, etc. The currently widely used phase-locked loop frequency multiplier has the advantages of high precision, but also has the disadvantages of complex circuit structure and large size. With the rapid development of microelectronics technology, new materials, new techno...

AI Technical Summary

Problems solved by technology

The current widely used phase-locked loop frequency multiplier has the advantages of high precision, but also has the disadvantages of complex circuit structure and large size.

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