Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method

A power sensor, thermoelectric technology, applied in the direction of power oscillators, electrical components, etc., can solve the problems of large size, complex circuit structure, etc., and achieve the effect of easy integration, high precision, and novel structure

Inactive Publication Date: 2013-10-09
SOUTHEAST UNIV
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Problems solved by technology

The current widely used phase-locked loop frequency multiplier has the advantages of hig

Method used

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  • Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method
  • Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method
  • Frequency multiplier based on micromachine indirect thermoelectric type power sensor and manufacturing method

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Example Embodiment

[0042] The present invention will be further explained below in conjunction with the drawings.

[0043] Such as figure 1 As shown, a frequency doubler based on a micromechanical indirect thermoelectric power sensor proposed by the present invention includes a substrate made of gallium arsenide (GaAs), a power combiner and a MEMS indirect A microwave power sensor, an external voltage-controlled oscillator and a divider, define an axis of symmetry on the substrate 1, such as figure 2 Shown.

[0044] The power combiner forms a symmetrical structure along the axis of symmetry, including a ground wire 2, a coplanar waveguide transmission line 3, two asymmetric coplanar strip lines 4, an isolation resistor 5, two sets of fixed beams 12 and an anchor zone 13; The function of is to vector synthesize the reference signal and the signal output by the divider (÷N) feedback loop. There is a phase difference between the two microwave signals for vector synthesis, and the power of the synthes...

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Abstract

The invention discloses a frequency multiplier based on a micromachine indirect thermoelectric type power sensor and a manufacturing method. The frequency multiplier comprises a substrate, a power combiner, an MEMS indirect type microwave power sensor, an external voltage-controlled oscillator and an external divider, wherein the substrate is made of gallium arsenide, and the power combiner and the MEMS indirect type microwave power sensor are installed on the substrate. An output signal of the voltage-controlled oscillator passes through the divider and then is fed back to an input end of the power combiner, a reference signal is applied to another input end of the voltage-controlled oscillator and is detected by the indirect thermoelectric type power sensor, and a voltage is obtained, wherein a ratio is formed between the voltage and a phase difference of the reference signal and the output signal of the voltage-controlled oscillator. The voltage is applied to the input end of the voltage-controlled oscillator, and the local oscillator signal frequency of the voltage-controlled oscillator changes along with changes of the voltage. On the basis, the invention further discloses a manufacturing method of the frequency multiplier based on the micromachine indirect thermoelectric type power sensor. The frequency multiplier is simple in structure, smaller in size, higher in precision, and good in practicability.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems (MEMS), in particular to a frequency multiplier based on a micro-mechanical indirect thermoelectric power sensor. Background technique [0002] A frequency multiplier is a circuit that makes the output signal frequency equal to an integer multiple of the input signal frequency. A frequency multiplier can be formed by using a nonlinear circuit to generate higher harmonics or using a frequency control loop. A frequency multiplier can also consist of a voltage-controlled oscillator and control loop. Frequency multipliers are used in many fields, such as wireless communication, radar, digital TV, broadcasting, etc. The currently widely used phase-locked loop frequency multiplier has the advantages of high precision, but also has the disadvantages of complex circuit structure and large size. With the rapid development of microelectronics technology, new materials, new techno...

Claims

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Application Information

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IPC IPC(8): H03B19/00
Inventor 廖小平杨国
Owner SOUTHEAST UNIV
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