A frequency divider and its manufacturing method based on micromechanical indirect thermoelectric power sensor
A power sensor, thermoelectric technology, applied in the direction of automatic power control, electrical components, etc., can solve the problems of complex circuit structure, large size, etc., and achieve the effect of high precision, easy integration, and novel structure
Inactive Publication Date: 2015-09-09
SOUTHEAST UNIV
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Problems solved by technology
The currently widely used phase-locked loop frequency divider has the advantages of high precision, but also has the disadvantages of complex circuit structure and large size.
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[0042] The present invention will be further explained below in conjunction with the accompanying drawings.
[0043] like figure 1 As shown, a frequency divider based on a micromechanical indirect thermoelectric power sensor proposed by the present invention includes a substrate 1 made of gallium arsenide (GaAs), a power combiner arranged on the substrate 1, and a MEMS indirect type microwave power sensor, and an external voltage-controlled oscillator and multiplier, define a symmetry axis on the substrate 1, such as figure 2 shown.
[0044] The power combiner forms a symmetrical structure along the axis of symmetry, including ground wire 2, coplanar waveguide transmission line 3, two sections of asymmetric coplanar stripline 4, isolation resistor 5, two sets of fixed support beams 12 and anchor area 13; the power combiner The function of is to vector synthesize the reference signal and the signal output by the multiplier (×N) feedback loop. There is a phase difference bet...
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The invention discloses a frequency divider based on a micromachine indirect thermoelectric type power sensor and a manufacturing method. The frequency divider comprises a substrate, a power combiner, an MEMS indirect type microwave power sensor, an external voltage-controlled oscillator and an external divider, wherein the substrate is made of gallium arsenide, and the power combiner and the MEMS indirect type microwave power sensor are installed on the substrate. An output signal of the voltage-controlled oscillator passes through the divider and then is fed back to an input end of the power combiner, a reference signal is applied to another input end of the voltage-controlled oscillator and is detected by the indirect thermoelectric type power sensor, and a voltage is obtained, wherein a ratio is formed between the voltage and a phase difference of the reference signal and the output signal of the voltage-controlled oscillator. The voltage is applied to the input end of the voltage-controlled oscillator, and the local oscillator signal frequency of the voltage-controlled oscillator changes along with changes of the voltage. On the basis, the invention further discloses a manufacturing method of the frequency divider based on the micromachine indirect thermoelectric type power sensor. The frequency divider is simple in structure, smaller in size, higher in precision, and good in practicability.
Description
technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems (MEMS), in particular to a frequency divider based on a micro-mechanical indirect thermoelectric power sensor. Background technique [0002] A frequency divider is a circuit that makes the output signal frequency an integer submultiple of its input frequency. Frequency dividers are used in many fields, such as wireless communication, radar, digital TV, broadcasting, etc. The currently widely used phase-locked loop frequency divider has the advantage of high precision, but also has the disadvantages of complex circuit structure and large size. With the rapid development of microelectronics technology, new materials, new technologies, and new processes continue to emerge, prompting the continuous improvement of requirements for electronic equipment such as wireless communication systems and radar systems: simple structure, small volume and high-precision frequency division ...
Claims
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IPC IPC(8): H03L7/18H03L7/08
Inventor 廖小平杨国
Owner SOUTHEAST UNIV