End face grinding device glass substrate and end face grinding method
An end face grinding, glass substrate technology, applied in machine tools suitable for grinding workpiece planes, grinding/polishing equipment, machine tools suitable for grinding workpiece edges, etc., can solve the problem of poor quality, increased grinding wheel load, end face The operation rate of the grinding device is reduced, and the effect of improving the operation rate, improving the yield and reducing the load is achieved.
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no. 1 approach
[0057] In this embodiment, the end surface grinding apparatus of the glass substrate of this invention is demonstrated.
[0058] First, use Figure 1a , Figure 1b , figure 2 , a configuration example of an end surface grinding apparatus for a glass substrate will be described.
[0059] Figure 1a , Figure 1b It is a schematic diagram of an end grinding device 10 for a glass substrate, Figure 1a represents a side view, Figure 1b Indicates a top view.
[0060]A rectangular workpiece W (glass substrate) to be ground is detachably held by the holding unit 11 with its end surface exposed from the holding unit 11 .
[0061] Here, the material, manufacturing method, and plate thickness of the workpiece W (glass substrate) are not particularly limited, and various glass substrates can be used. For example, as the material (material) of the workpiece W, alkali-free glass, soda-lime glass, quartz glass, or the like that does not substantially contain alkali metal oxides for gl...
no. 2 approach
[0098] In this embodiment, the end surface grinding method of the glass substrate of this invention is demonstrated.
[0099] In the end surface grinding method of a glass substrate of the present invention, the end surface of a glass substrate is ground by a primary end surface grinding unit, and then ground in a secondary end surface grinding unit. The end surface grinding method of a glass substrate It is characterized in that the primary end grinding part and the secondary end grinding part are equipped with cylindrical grinding wheels, grooves are formed on the side surfaces of the grinding wheels along the circumferential direction, and the cylindrical grinding wheels are used including The cross-sectional shape of the groove when the plane of the central axis of the grinding wheel is cut has a shape gradually widening from the bottom side of the groove to the surface side of the grinding wheel, and the opening angle of the groove formed on the grinding wheel of the prima...
Embodiment 1
[0120] In the end grinding device of the glass substrate shown in Fig. 1, as the grinding wheel of the primary end grinding part and the secondary end grinding part, the primary end grinding part and the secondary end grinding part are respectively used on the side surfaces of the primary end grinding part and the secondary end grinding part. formed with Figure 4a , Figure 4b A cylindrical grinding wheel with grooves of the shown shape grinds the end face of the glass substrate.
[0121] Grooves formed on the grinding wheel of the primary face grinding section such as Figure 4a As shown, the groove gradually becomes wider from the bottom side of the groove toward the surface of the grinding wheel (the surface of the side surface of the grinding wheel), and the bottom of the groove becomes a curve protruding toward the bottom side with a curvature radius 42 of 0.5 mm. Also, the opening angle 41 of the groove is 75 degrees.
[0122] Also, the groove formed on the grinding ...
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