Impedance matching method, impedance matching system, and plasma processing device
A technology of impedance matching and impedance matching network, which is applied in the field of microelectronics, can solve the problems of low efficiency, difficult impedance matching, and low reliability of impedance matching, and achieve the effect of simplifying the matching process, reducing difficulty, and reliable matching
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[0050] In order for those skilled in the art to better understand the technical solution of the present invention, the impedance matching system, impedance matching method and plasma processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0051] figure 2 It is a schematic structural diagram of an impedance matching system provided in Embodiment 1 of the present invention, image 3 for image 3 Equivalent circuit diagram of the medium impedance matching system. Please also refer to figure 2 and image 3 , the impedance matching system includes: an impedance matching network 2, which is arranged between the radio frequency power supply 1 and the load 3, and is used for conjugate matching the input impedance of the impedance matching network 2 and the output impedance of the radio frequency power supply 1.
[0052] The impedance matching network 2 includes: a transformer 21 , an inductor L and a...
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