Method and device for cleaning silicon powder of workpiece supports

Abstract

The invention relates to a method and a device for cleaning silicon powder of workpiece supports. A plurality of air blowing nozzles are arranged on a row-shaped ion air nozzle, and the air blowing nozzles are located between every two polar plates of a workpiece support respectively; a high voltage power supply generator inside the row-shaped ion air nozzle ionizes compressed air conveyed inside the row-shaped ion air nozzle to generate positive and negative charges; the compressed air carried with the positive and negative charges blows towards the surface of the polar plates of the workpiece support through the air blowing nozzles to neutralize charges carried by silicon powder adhered to the surface of the polar plates of the workpiece support and to reduce the adhesive force of the silicon powder; a power unit drives the row-shaped ion air nozzle to perform reciprocating motion up and down in a perpendicular direction to blow off the silicon powder on the polar plates of the workpiece support; brush bristles on the surface of the air blowing nozzles are used for brushing and cleaning the surfaces of the polar plates of the workpiece support during the up-and-down motion of the row-shaped ion air nozzle. The cleanliness of the workpiece support is improved, the manpower is saved, the cleaning efficiency is improved, the formation of PECVD (Plasma Enhanced Chemical Vapor Deposition) coated film pinhole through holes can be reduced, and the amorphous silicon thin film conversion efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a method and a device for removing silicon powder from a workpiece frame loaded with a thin film substrate in a solar cell. Background technique [0002] In order to reduce environmental pollution and CO2 greenhouse gas emissions, the solar energy industry has become a strategic requirement of every country. At present, the products in the photovoltaic market are divided into crystalline silicon solar cells and thin-film solar cells. Compared with crystalline silicon solar cells, thin-film solar cells have the advantages of low price, low pollution, high flexibility, good weak light effect, and suitable for use in large areas. advantage. The Si / SiGe / Si triple stack structure deposited by PECVD is the power generation layer of the thin film battery, which is responsible for generating photogenerated carriers, which directly determines the open circuit voltage, short circuit c...

AI Technical Summary

Problems solved by technology

Under the existing production conditions, the cleaning of the workpiece holder is only to be blown with CDA, and the edge is wiped with alcohol, and the cleaning effect is very poor

Moreover, the silicon powder purged by CDA is suspended in the air, which not only causes secondary pollution of the workpiece rack, but also is easily inhaled into the respiratory tract, causing harm to the human body.

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