Clamping and conveying device and method for wafer pin electroplating
A technology for conveying devices and wafers, which is applied in the direction of conveyor objects, transportation and packaging, etc. It can solve the problems of affecting product production efficiency, high product defective rate, low electroplating efficiency, etc., and achieves good clamping effect and high degree of intelligence , The effect of fast feeding speed
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[0044] The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.
[0045] The clamping and conveying device for wafer pin electroplating includes a feeding device and a conveyor belt clamping device, and the feeding device includes a wafer disk pushing device and a wafer disk clamping and turning device.
[0046] The wafer tray pushing device is used to push the wafer tray 1 to the wafer tray clamping and turning device, which includes a loading tray 2 and a wafer tray pushing mechanism. Such as figure 1 As shown, the loading tray 2 is provided with a push groove 9 matched with the movement direction of the column 3 . Such as figure 2As shown, the wafer disk pushing mechanism includes multiple rows of columns 3, jacking cylinders A4 and pushing cylinders 5, and the rows of columns 3 are fixedly installe...
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