Mass spectrum analyzer with multiple-reflection vacuum ultraviolet ionization source

Abstract

The invention relates to a mass spectrum analyzer with a multiple-reflection vacuum ultraviolet ionization source. The mass spectrum analyzer comprises a photo ionization chamber, a differential chamber and a mass spectrum chamber. A vacuum ultraviolet ionization source which consists of a vacuum ultraviolet light source, a repelling electrode and a focusing electrode is arranged in the photo ionization chamber. An ion optical system is arranged in the differential chamber. A mass analyzer is arranged in the mass spectrum chamber. Corresponding side surfaces of the repelling electrode and the focusing electrode are conical surfaces or arc surfaces. Reflecting layers are respectively plated on the conical surfaces or the arc surfaces of the repelling electrode and the focusing electrode. The material of the reflecting layers is gold, aluminum or iridium. The mass spectrum analyzer with the multiple-reflection vacuum ultraviolet ionization source has the advantages that emergent light coming from the vacuum ultraviolet light source is enabled to be multiply reflected between the repelling electrode and the focusing electrode, the ionization probability of objects to be tested is increased, the ionization efficiency is improved by more than 2-6 times, the sensitivity of sample testing is greatly improved, and the application to the real-time and online monitoring of some trace gas compositions and volatile matters is wide.

Description

technical field [0001] The invention belongs to the technical field of mass spectrometer analysis instruments, in particular to mass spectrometer analyzers with multiple reflection vacuum ultraviolet photoionization sources. Background technique [0002] Mass spectrometry is an important method for identifying molecular structures. A modern mass spectrometer is mainly composed of a vacuum system, a sampling system, an ion source, a mass analyzer, a detector, and a data processing system. According to the structure and properties of the analyte, there are various ionization methods of mass spectrometry, such as electron bombardment ionization, chemical ionization, electrospray ionization, matrix-assisted laser desorption ionization and so on. Vacuum ultraviolet photoionization is a method that uses vacuum ultraviolet light with a wavelength of less than 200nm to ionize neutral molecules. This ionization method is a soft ionization process, almost no fragment ions are genera...

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Problems solved by technology

[0003] In order to solve the problem that a large number of photons in the existing vacuum ultraviolet photoionization source are not absorbed by neutral molecules and are lost, and the ionization efficiency is not high, the present invention provides a mass spectrometer with multiple reflection vacuum ultraviolet photoionization sources

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