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Magnetron sputtering aluminum plating + arc glow chromizing + recoil ion implantation to prepare fe‑al‑cr alloy layer

A magnetron sputtering plating and arc glowing technology, which is applied to the metal material coating process, coating, superimposed layer plating, etc., can solve the problem of Al depletion on the surface, concentrated distribution of high Al brittle phases, coating Reduce the service life and other problems, achieve the effect of excellent performance and uniform distribution of elements

Active Publication Date: 2017-05-31
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, there is an invention patent ZL201310076784.1 using double-glow plasma surface metallurgy technology and invention patent CN201410780471.9 using a combination of double-glow technology and ion implantation to prepare Fe-Al-Cr coatings, but both methods have poor surface Al. Alloying elements such as Fe, Al, and Cr in the coating are distributed in a gradient rather than uniform distribution, which can easily cause high Al brittle phases to concentrate on the sub-surface of the coating, reducing the service life of the coating

Method used

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  • Magnetron sputtering aluminum plating + arc glow chromizing + recoil ion implantation to prepare fe‑al‑cr alloy layer
  • Magnetron sputtering aluminum plating + arc glow chromizing + recoil ion implantation to prepare fe‑al‑cr alloy layer
  • Magnetron sputtering aluminum plating + arc glow chromizing + recoil ion implantation to prepare fe‑al‑cr alloy layer

Examples

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Effect test

Embodiment 1

[0026] Present embodiment 1 is implemented under the following implementation conditions and technical requirements:

[0027] First, the surface of 304 stainless steel is ground and polished to make the surface roughness Ra reach 0.5 μm, and the ultrasonic time is 25 minutes.

[0028] Then magnetron sputtering technology is used to plate Al on the surface of 304 stainless steel, wherein the target material is 99.99wt% Al. The specific process parameters selected are: the working air pressure is 3.5Pa, the pole spacing is 18mm, the deposition time is 2.5h, and the working power is 145W.

[0029] Then, the outer surface of the Al plating layer obtained in the previous step is subjected to Cr infiltration treatment by using the arc glow technology, wherein the target material is 99.99% Cr. The selected process parameters are Ar gas pressure of 45Pa, arc current of 60A, pole spacing of 100mm, bias voltage of 500V, temperature of 800°C, and working time of 60min.

[0030] Finally...

Embodiment 2

[0033] This embodiment 2 is implemented under the following implementation conditions and technical requirements:

[0034] First, the surface of 316 stainless steel is ground and polished to make the surface roughness Ra reach 1.5 μm, and the ultrasonic time is 25 minutes.

[0035] Then magnetron sputtering technology is used to plate Al on the surface of 316 stainless steel, wherein the target material is 99.99wt% Al. The specific process parameters selected are: the working air pressure is 6.5Pa, the pole spacing is 22mm, the deposition time is 3.5h, and the working power is 155W.

[0036] The outer surface of the magnetron sputtering Al layer obtained in the previous step is further infiltrated with Cr by using the arc glow technology, wherein the target material is 99.99% Cr. The selected process parameters are Ar gas pressure of 55Pa, arc current of 80A, pole spacing of 140mm, bias voltage of 700V, temperature of 850°C, and working time of 100min.

[0037] Finally, the ...

Embodiment 3

[0040] This embodiment 3 is implemented under the following implementation conditions and technical requirements:

[0041] First, the surface of 430 stainless steel is ground and polished to make the surface roughness Ra reach 1 μm, and the ultrasonic time is 25 minutes.

[0042] Then magnetron sputtering technology is used to plate Al on the surface of 430 stainless steel, wherein the target material is 99.99wt% Al. The specific process parameters selected are: the working air pressure is 4.5Pa, the pole spacing is 20mm, the deposition time is 3h, and the working power is 150W.

[0043]The outer surface of the magnetron sputtering Al layer obtained in the previous step is further infiltrated with Cr by using the arc glow technology, wherein the target material is 99.99% Cr. The selected process parameters are Ar gas pressure of 50Pa, arc current of 70A, pole spacing of 120mm, bias voltage of 600V, temperature of 800°C, and working time of 80min.

[0044] Finally, the ion im...

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Abstract

The invention belongs to the field of metal surface modification, and particularly relates to a method for preparing a Fe-Al-Cr coating with alloy elements evenly distributed through combination of magnetron sputtering aluminizing, arc-added glow chromizing and recoil ion implantation. The method comprises the following specific steps of 1, carrying out surface pretreatment on the surface of stainless steel and drying after ultrasonic cleaning; 2, carrying out aluminizing through the magnetron sputtering technology; 3, carrying out chromizing through the arc-added glow technology; and 4, bombarding a film on the surface of materials through the recoil ion implantation technology. The method can avoid formation of pure Cr of a surface settled layer of the coating and precipitation of the high Al brittle phase near the sub-surface, guarantee even distribution of Fe, Al and Cr in the sectional direction, prolong the service life of the coating and improve high-temperature oxidation resistance and friction and abrasion resistance of the coating.

Description

technical field [0001] The invention belongs to the field of metal surface modification. Specifically, it involves the preparation of Fe-Al-Cr coatings with uniform distribution of alloy elements by using the combination of magnetron sputtering Al plating, arc-added glow infiltration Cr and recoil ion implantation. Background technique [0002] Fe-Al intermetallic compound is one of the most deeply researched intermetallic compounds at present. It has high specific strength, excellent corrosion resistance, abundant resources and low cost. However, due to the nature of its own bond, crystal structure, defect sensitivity, degree of order, and environment, the plasticity, toughness, and high-temperature comprehensive performance of the Fe-Al alloy coating still cannot meet the harsh coexistence of high temperature, hot corrosion, and wear. The requirements of the service environment severely restrict the application of Fe-Al alloy coatings in industrial production. [0003] S...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/02C23C14/35C23C10/10C23C14/48
Inventor 姚正军罗西希张平则周克印张泽磊陶学伟李中杜文博方超
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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