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Method for preparing Fe-Al-Nb alloy layer through magnetron sputtering aluminizing, arc-added glow niobsing and recoil ion implantation

A magnetron sputtering plating and arc glow technology, applied in the field of Fe-Al-Nb coating, can solve the problems of surface Al depletion, generation of a large number of holes, lack of protection, etc., to achieve excellent performance, elemental Evenly distributed effect

Active Publication Date: 2015-11-11
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method requires a high degree of vacuum and no oxygen atoms in the environment during the vacuum diffusion annealing process, otherwise a large number of holes will be generated in the surface coating due to the Kirkendall effect, and then post-processing is required to remove The hole layer on the surface must be ground and removed before the next step of double-layer glow plasma surface infiltration of Nb can be carried out. This post-treatment process is time-consuming and the consistency of the coating thickness cannot be guaranteed; in addition, the final coating has a large amount of pure Nb The problem that Nb forms a deposition layer on the surface and the surface Al is depleted, the alloying elements such as Fe, Al, Nb in the coating are distributed in a gradient rather than uniform distribution, so Al is easily concentrated in the middle of the coating, forming a high Al brittle phase and Decreases the service life of the coating

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  • Method for preparing Fe-Al-Nb alloy layer through magnetron sputtering aluminizing, arc-added glow niobsing and recoil ion implantation
  • Method for preparing Fe-Al-Nb alloy layer through magnetron sputtering aluminizing, arc-added glow niobsing and recoil ion implantation
  • Method for preparing Fe-Al-Nb alloy layer through magnetron sputtering aluminizing, arc-added glow niobsing and recoil ion implantation

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Embodiment 1

[0025] Present embodiment 1 is implemented under the following implementation conditions and technical requirements:

[0026] First, the surface of 304 stainless steel is ground and polished to make the surface roughness Ra reach 0.5, and the ultrasonic time is 25 minutes.

[0027] Then magnetron sputtering technology is used to plate Al on the surface of 304 stainless steel, wherein the target material is 99.99% Al. The specific process parameters selected are: the working air pressure is 4.5Pa, the pole spacing is 20mm, the deposition time is 3h, and the working power is 150W.

[0028] Then, the outer surface of the Al plating layer obtained in the previous step is further infiltrated with Nb by using the arc glow technology, wherein the target material is 99.99% Nb. The selected process parameters are Ar gas pressure of 45Pa, arc current of 60A, pole spacing of 100mm, bias voltage of 500V, temperature of 800°C, and working time of 60min.

[0029] Finally, the ion implanta...

Embodiment 2

[0032] This embodiment is implemented under the following implementation conditions and technical requirements:

[0033] First, the surface of 304 stainless steel is ground and polished to make the surface roughness Ra reach 1.0, and the ultrasonic time is 25 minutes.

[0034] Then magnetron sputtering technology is used to plate Al on the surface of 304 stainless steel, wherein the target material is 99.99% Al. The specific process parameters selected are: the working air pressure is 6.5Pa, the pole spacing is 22mm, the deposition time is 3.5h, and the working power is 155W.

[0035] Then, the outer surface of the Al plating layer obtained in the previous step is further infiltrated with Nb by using the arc glow technology, wherein the target material is 99.99% Nb. The selected process parameters are Ar gas pressure of 55Pa, arc current of 80A, pole spacing of 140mm, bias voltage of 700V, temperature of 850°C, and working time of 100min.

[0036] Finally, the ion implantati...

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Abstract

The invention belongs to the field of metal surface modification and particularly relates to a method for preparing a Fe-Al-Nb coating with alloy elements distributed evenly through combination of magnetron sputtering aluminizing, arc-added glow niobsing and recoil ion implantation. The method comprises the specific steps that 1, the stainless steel surface is pretreated and is dried after ultrasonic cleaning; 2, the magnetron sputtering technology is adopted for aluminizing; 3, the arc-added glow technology is adopted for niobsing; and 4, the recoil ion implantation technology is adopted for bombarding a film of the material surface. The method can avoid occurrence of holes in the coating, formation of pure Nb of a surface sediment layer of the coating and precipitation of a high Al brittle phase near the subsurface are avoided, even distribution of three alloy elements of Fe, Al and Nb in the cross direction is ensured, the service life of the coating is prolonged, and high temperature oxidation resistance and friction and abrasion resistance are improved.

Description

technical field [0001] The invention belongs to the field of metal surface modification. It specifically relates to the preparation of Fe-Al-Nb coatings with uniform distribution of alloy elements by using the combination of magnetron sputtering Al plating, arc-adding glow infiltration Nb and recoil ion implantation. Background technique [0002] Fe-Al intermetallic compound is one of the most deeply researched intermetallic compounds at present. It has high specific strength, excellent corrosion resistance, abundant resources and low cost. However, due to the nature of its own bonding bonds, crystal structure, defect sensitivity, degree of order, and environmental factors, the plasticity, toughness, and high-temperature comprehensive performance of Fe-Al alloy coatings above 600 °C cannot meet high temperature, thermal corrosion, and wear. The coexistence of harsh service environment requirements severely restricts the industrial application of Fe-Al alloy coatings in larg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/02C23C14/35C23C10/10C23C14/48
Inventor 姚正军张泽磊张平则周克印罗西希陈煜李中
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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