Fe-al-nb alloy layer prepared by magnetron sputtering aluminum plating + arc glow niobium infiltration + recoil ion implantation

Abstract

The invention belongs to the field of metal surface modification. Specifically, it involves the combination of magnetron sputtering Al plating, arc glow infiltration Nb and recoil ion implantation to prepare Fe-Al-Nb coating with uniform distribution of alloying elements. The specific steps are as follows: Step 1: Firstly, carry out surface pretreatment on the surface of stainless steel, and then dry it after ultrasonic cleaning; Step 2: Use magnetron sputtering technology to plate Al; Step 3: Use arc glow technology to infiltrate Nb; Step 4 : Recoil ion implantation technology is used to bombard the thin film on the surface of the material. The invention can avoid the appearance of holes in the coating, solve the formation of pure Nb in the deposition layer on the coating surface and the precipitation of high Al brittle phases near the subsurface, ensure that the three alloying elements of Fe, Al and Nb are evenly distributed along the cross-sectional direction, and improve the coating quality. The service life of the layer is improved, and its high temperature oxidation resistance and friction and wear resistance are improved.

Description

technical field [0001] The invention belongs to the field of metal surface modification. It specifically relates to the preparation of Fe-Al-Nb coatings with uniform distribution of alloy elements by using the combination of magnetron sputtering Al plating, arc-adding glow infiltration Nb and recoil ion implantation. Background technique [0002] Fe-Al intermetallic compound is one of the most deeply researched intermetallic compounds at present. It has high specific strength, excellent corrosion resistance, abundant resources and low cost. However, due to the nature of its own bonding bonds, crystal structure, defect sensitivity, degree of order, and environmental factors, the plasticity, toughness, and high-temperature comprehensive performance of Fe-Al alloy coatings above 600 °C cannot meet high temperature, thermal corrosion, and wear. The coexistence of harsh service environment requirements severely restricts the industrial application of Fe-Al alloy coatings in larg...

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Problems solved by technology

However, this method requires a high degree of vacuum and no oxygen atoms in the environment during the vacuum diffusion annealing process, otherwise a large number of holes will be generated in the surface coating due to the Kirkendall effect, and then post-processing is required to remove The hole layer on the surface must be ground and removed before the next step of double-layer glow plasma surface infiltration of Nb can be carried out. This post-treatment process is time-consuming and the consistency of the coating thickness cannot be guaranteed; in addition, the final coating has a large amount of pure Nb The problem that Nb forms a deposition layer on the surface and the surface Al is depleted, the alloying elements such as Fe, Al, Nb in the coating are distributed in a gradient rather than uniform distribution, so Al is easily concentrated in the middle of the coating, forming a high Al brittle phase and Decreases the service life of the coating

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