High-speed SNSPD with high-absorption structure and preparation method of high-speed SNSPD
A strong absorption, high-speed technology, applied in the field of single-photon detection, can solve the problems of low yield and the decrease of the intrinsic quantum efficiency of the detector, so as to reduce the probability of defects, ensure high-quality growth, and improve the highest count rate. Effect
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[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0025] The present invention provides a comparative SNSPD, referred to as "the first structure", and the SNSPD of the present invention is referred to as the "second structure".
[0026] Such as figure 1 Shown is the first superconducting nanowire single photon detector with a strong absorption structure, including the underlying Si substrate-1, on which multi-layer Si / SiO is deposited 2 Periodically arranged Bragg reflectors 2, the top of the Bragg reflector 2 is provided with a bottom resonant cavity-3 formed by epitaxial single crystal Si, and above the bottom resonant cavity-3 there are superconducting nanowires-4, superconducting nanowires-4 There is an upper strata air resonant cavity 5, and a Si sheet 6 is arranged above the upper strata air resonant cavity 5, and an antireflection film-7 is arranged on the Si sheet 6.
[0027] Multil...
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