A high temperature foil strain gauge and its manufacturing method
A manufacturing method and strain gauge technology, applied in the direction of electric/magnetic solid deformation measurement, electromagnetic measurement device, etc., to achieve good anti-carburization performance, good adhesion, and good corrosion resistance
Active Publication Date: 2016-09-21
ZHONGHANG ELECTRONICS MEASURING INSTR
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[0011] However, the above-mentioned foil strain gauge can withstand a maximum temperature of 250°C, which is far from being able to adapt to the harsh high-temperature environment (above 400°C).
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[0031] see figure 1 and figure 2 As shown, the foil-type high-temperature strain gauge provided by the present invention is mainly composed of a foil-type sensitive grid 2 , pads, leads 4 , and a temporary frame 3 designed according to the characteristics of high-temperature testing. The foil-type sensitive gate includes a sensitive gate body, side gates, and pads, and is formed by planar chemical etching, laser etching and other processes. The sensitive grid pattern can be designed into different structures according to the functional requirements, at least including the sensitive grid and the terminal. The pad and the lead wire are fused and closely connected by heat fusion welding, resistance welding, ultrasonic welding, etc. to ensure reliable and stable signal transmission. By selecting the metal alloy foil material and graphic design to control the resistance value of etching, combined with wire resistance and resistance value adjustment, the resistance value can be s...
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Abstract
The invention discloses a high-temperature foil-type strain gauge and a manufacturing method thereof, which comprise three parts: a sensitive grid (2), a lead wire (4) and a temporary frame (5). The temporary substrate (1) is thermally laminated with the metal alloy foil through an adhesive or hot melt, and is formed by photolithography, chemical etching or laser etching. The resistance value of the sensitive grid (2) is adjusted to reach the target resistance value through mechanical, chemical, laser and other means. The temporary substrate (1) is chemically melted or removed and turned over to the temporary frame (3), so that the sensitive grid of the strain gauge is partially exposed. Finally, hot melt welding, resistance welding, ultrasonic welding, etc. are used to melt and closely connect the pad and the lead wire (4) to form a high temperature foil strain gauge. The high-temperature foil strain gauge of the present invention has multiple resistance values, the resistance dispersion is not more than ±1%, has a single-axis, double-axis and multi-axis sensitive grid structure, and can meet the stable and reliable measurement of stress and strain in the range of 400-1100°C.
Description
technical field [0001] The invention relates to a strain gauge and a manufacturing method thereof, in particular to a high-temperature foil type strain gauge and a manufacturing method thereof. Background technique [0002] Usually, strain gauges are used as stress and strain measurement sensitive elements, and are widely used in energy, transportation, civil engineering, electronics, chemical industry, aerospace, military and other fields. With the rapid development of aerospace, energy, nuclear industry, military and other technologies, higher requirements are put forward for the safety and health monitoring of aircraft, engines, generator sets, reaction devices, and smelting devices. It is also hoped that they can truly reflect the operating status, structural status, Safe state, design state, failure mode, etc. The strain gauges used in these fields are characterized by being able to work normally in harsh high-temperature environments (above 400°C). [0003] The manufa...
Claims
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IPC IPC(8): G01B7/16
Inventor 晏志鹏赵家辉刘鹏张志刚张勋刘旭熊英任博哲雒平华
Owner ZHONGHANG ELECTRONICS MEASURING INSTR