A kind of cleaning process method of ferrite substrate based on neutral solution
A neutral solution and ferrite technology, applied in the field of micromachining, can solve the problem of not easy to clean the ferrite substrate, and achieve the effect of easy recovery and easier removal
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Problems solved by technology
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Examples
Embodiment 1
[0059] (1) Polish the side and non-exposed surface of the substrate with filter paper, and there are no obvious impurity particles on the side and non-polished surface.
[0060] (2) Place the substrate flat in a glass container or a stainless steel container, and use tap water, absolute ethanol, and 3% washing powder solution as cleaning agents in sequence. The solution should be 5mm higher than the surface of the substrate. Adjust the power of the ultrasonic cleaner to 120W, the frequency is 60KHz to ultrasonic the substrate for 11 minutes;
[0061] (3) Put the substrate in a ceramic crucible and use 50 o C Rinse the substrate with hot water.
[0062] (4) Put the substrate in a crystallization dish, use sorbose with a heavy metal content of less than 0.001%, deionized water with a resistance greater than 18Ω, absolute ethanol, and acetone as cleaning agents in sequence. The solution should be 5mm higher than the surface of the substrate. Adjust The power of the ultrasonic c...
Embodiment 2-5
[0066] According to the method and steps of Example 1, but the ethanol in step (2) and step (4) is changed to n-butanol, n-hexanol, n-octanol, n-decyl alcohol.
Embodiment 6
[0068] Follow the method and steps of Example 1, but change the parameter settings of the ultrasonic cleaning machine in steps (2) and (4) to: the power is 200W, the time is 20 minutes, and the frequency is 100KHz.
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Abstract
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