Electronic biosensor based on single electric charge detection
An electronic sensor and base technology, applied in the field of electronic sensors, can solve problems such as harmful signal noise and achieve the effect of high sensitivity
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[0021] The electronic sensor 10 according to the present invention figure 1 It is schematically shown in, the electronic sensor includes a combined MOSFET and BJT, as shown in the schematic circuit diagram superimposed in the figure. reference figure 1 Starting from the bottom, the sensor device includes a silicon substrate as an anode layer 15 of a conventional type. The substrate 15 is preferably (100)-crystalline orientation. In the second embodiment of the present invention, the substrate 15 may also be a silicon-on-insulator (SOI) substrate. The substrate 15 may also be a SiC or Ge substrate. On the top of the anode 15, a vertical pnp transistor (Bipolar Junction Transistor-BJT) is formed by the following parts: the first p+ layer 20, which has a typical thickness of about 1 μm and a typical dopant concentration of 3×10 19 cm -3 ; N-region 25, its typical thickness is about 3μm and the typical dopant concentration is 10 16 cm -3 ; P zone 30, its typical surface concentrat...
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