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Laser optical path automatic collimation device

An automatic collimation and optical path technology, applied in optics, optical components, instruments, etc., can solve the problems of unguaranteed adjustment accuracy and accuracy, large adjustment error, etc., and achieve the effect of improving observation and adjustment accuracy.

Active Publication Date: 2016-01-20
CHINA INSTITUTE OF ATOMIC ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In addition, the traditional laser collimation system adjusts the optical path of the micron-scale spot by naked eyes. Due to the different judgments of each person's eyes and different observation angles, the adjustment error is relatively large.
And all frames are manual adjustment frames, and the adjustment top screw adopts a fine-pitch screw with a pitch of 0.25mm, so the adjustment accuracy and accuracy cannot be guaranteed to be ≤10%.

Method used

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  • Laser optical path automatic collimation device

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Effect test

Embodiment

[0024] The six beams of laser light output by the KrF excimer laser with a wavelength of 248nm are collimated by using the laser optical path automatic collimation device provided by the present invention.

[0025] Laser optical path automatic collimation device, which includes six 0° concave mirrors 2, 45° total mirrors 3, focusing telescope 4, beam splitter 5, short focal length convex lens a6 and short The focal length convex lens b8, the device also includes high-resolution and fast-response CCD probe a7 and CCD probe b9, computer 11 and controller 12, wherein the image formed by the CCD probe a7 is 3 to 4 times the real image, and the image formed by the CCD probe b9 Like the real image 10 to 15 times.

[0026] After the laser beam is shaped, it reaches the corresponding 0° concave mirror 2 at the same time, and each 0° concave mirror is located on an electric adjustable mirror frame, and the electric adjustable mirror frame 1 is located directly in front of the target ro...

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Abstract

The invention belongs to the technical field of laser collimation, and discloses an automatic collimating device for a laser path. The device comprises a group of 0-degree concave reflective lenses, a 45-degree all reflective lens, a focusing telescope, a beam splitter, a lens a and a lens b, the device also comprises a CCD probe a, a CCD probe b, a computer and a controller. The device has the advantages of good spatial discrimination capability, high precision and capability of realizing automation control.

Description

technical field [0001] The invention belongs to the technical field of laser collimation, and in particular relates to a laser optical path automatic collimation device. Background technique [0002] The optical path of the high-power excimer laser system of "Tianguang No. 1" is relatively complicated, and its basic working principle is: the seed light source output by the front end, after primary amplification, is injected into the pre-amplifier through beam splitting (divided into three beams); the pre-amplifier amplifies The last three beams of light are divided into six beams, which are injected into the main amplifier at the same time after the delay elimination; the six beams of light amplified by the main amplifier pass through the delay elimination system, and then through the focusing system, and hit the target at the same time. The laser focusing system must not only ensure that the light spot on the target position is in phase, but also must ensure the coincidence...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/30G02B27/00
Inventor 李静胡凤鸣向益淮高智星陆泽汤秀章
Owner CHINA INSTITUTE OF ATOMIC ENERGY