Laser heterodyne interferometry method and device for diagonally incident light based on rectangular prism

A laser heterodyne interference, right-angle prism technology, applied in the field of laser applications, can solve the problems of inability to meet the requirements of high precision and resolution of interferometers, restrict the development of ultra-precision machining and measurement fields, and be easily affected by ambient temperature. Adjustment difficulty and high processing cost, eliminating temperature drift and reducing adjustment difficulty

Active Publication Date: 2016-04-06
HARBIN INST OF TECH
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Problems solved by technology

However, the optical structure of this method is asymmetric and is easily affected by the ambient temperature.
[0006] To sum up, none of the existing laser heterodyne interferometry methods can meet the high precision and resolution requirements of the interferometer for ultra-precision machining measurement, which severely limits the development of the field of ultra-precision machining measurement.

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  • Laser heterodyne interferometry method and device for diagonally incident light based on rectangular prism
  • Laser heterodyne interferometry method and device for diagonally incident light based on rectangular prism
  • Laser heterodyne interferometry method and device for diagonally incident light based on rectangular prism

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Embodiment Construction

[0025] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] A kind of diagonal incident light laser heterodyne interferometry device based on right-angle prism, this device comprises non-polarization beam-splitting prism 1, reference right-angle prism 2, photodetector A4, photodetector B5, and described reference right-angle prism 2 is positioned at non-polarization Reflected light output end of beam splitting prism 1; the incident point of two beams of parallel light incident on non-polarizing beam splitting prism 1 is located at the diagonal position of the incident surface, non-polarizing beam splitting prism 1 outputs two interferometric beams, one of which is interferometric beam light A photodetector A4 is arranged on the road, and a photodetector B5 is arranged on another interferometric beam optical path; the device also includes a right-angle prism 3 at the target end, and the right-angle prism ...

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Abstract

The invention discloses a method and a device of heterodyne interferometry of incident light and laser at opposite angles based on a rectangular prism, and belongs to the technical field of laser application. The method adopts two beams of spatial isolation parallel light with different frequencies, incidence points of the two parallel beams on a non-polarization splitting prism are located on a diagonal of an incidence surface and are symmetrical about a central point of the incidence surface, and the rectangular prism is taken as a reference prism and a measuring prism; interferometry is carried out by generating two interferometry signals with opposite Doppler frequency shifts finally. According to the method and the device, the frequency aliasing phenomenon in an interferometer can be eliminated, the measuring precision of heterodyne interferometry is improved, and meanwhile, the resolution of heterodyne interferometry is doubled.

Description

technical field [0001] The invention belongs to the technical field of laser applications, and mainly relates to a laser heterodyne interferometry method and device for diagonally incident light based on a rectangular prism. Background technique [0002] Laser heterodyne interferometry is widely used in ultra-precision machining, lithography machines, and three-coordinate measuring machines because of its strong anti-interference ability, large measurement range, high signal-to-noise ratio, and easy realization of high precision. With the continuous development of ultra-precision engineering, higher and higher requirements are put forward for machining accuracy; at the same time, new challenges are raised for the measurement accuracy and resolution of heterodyne interferometry. [0003] In laser heterodyne interferometry, the nonlinear error severely limits the further improvement of measurement accuracy and resolution. Scholars at home and abroad have done a lot of research...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 胡鹏程谭久彬
Owner HARBIN INST OF TECH
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