Manufacturing method of multi-channel light filtering micro lens array

Abstract

The invention discloses a manufacturing method of a multi-channel light filtering micro lens array. According to the manufacturing method of the multi-channel light filtering micro lens array, due to the facts that a light filtering layer with the light filtering function is manufactured on a substrate by using photoresist with different colors and combining a traditional photoetching method, and then the micro convex lens array is directly manufactured on the light filtering layer through a hot melting method, the purpose that micro convex lenses have the integrated light filtering function can be achieved, additional optical filter structures are not needed, and development of the compact multi-channel light filtering micro lenses is achieved; a plurality of optical channels are arranged, and each optical channel can independently obtain image information of the corresponding wave band; due to the facts that the photoetching technology is adopted, and a first mask plate is used in cooperation, alignment between optical filters and the micro lens array is avoided; due to the fact that a light barrier layer is additionally arranged between every two adjacent micro convex lenses on the substrate, influence caused by incident stray light on the micro lenses can be reduced; the micro convex lens array can be applied to a multispectral imaging system, and monochrome imaging and color reconstruction are achieved; meanwhile, the micro convex lens array is compact in structure, and miniaturization of the multispectral imaging system is facilitated.

Description

technical field [0001] The invention is used in the field of optical devices, and in particular relates to a manufacturing method of a multi-channel filter microlens array. Background technique [0002] In some practical applications, sometimes people only care about the imaging of a certain monochromatic light. For example, what needs to be concerned about in human blood vessel imaging is the image formed by blue light, which requires the use of multispectral imaging systems. The multi-spectral imaging system can achieve accurate spectral separation and obtain multiple single-band image information. Combined with digital image processing technology, it can observe hidden information that cannot be observed by ordinary cameras. Reconstruction, remote sensing measurement, biomedical imaging and many other fields have a wide range of applications. Existing multispectral imaging systems usually place a filter wheel or liquid crystal tunable filter in front of a common camera ...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the above problems, the present invention provides a method for manufacturing a multi-channel filter microlens array that greatly r

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