Organic electroluminescent display panel and method for manufacturing same
A display panel and electroluminescence technology, applied in electroluminescence light sources, electric light sources, organic semiconductor devices, etc., can solve the problems of eye-catching anode wiring and poor transparency.
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Embodiment 1
[0114] Hereinafter, examples of the present invention will be described.
[0115] As a transparent substrate, alkali-free glass OA-10 manufactured by NEC Glass Co., Ltd. was prepared. The size of the substrate is 200 mm x 200 mm, in which the diagonal is 5 inches, and the display part of the display is arranged in the center.
[0116] This substrate was set in a sputter deposition apparatus equipped with ITO (indium tin oxide), and formed on the entire surface so as to have a thickness of 50 nm.
[0117] Next, after forming a positive resist TFR790PL manufactured by Ohka Co., Ltd. on the entire surface of the substrate with a thickness of 2 μm by a spin coater, the anode is retained by photolithography, the anode is removed from the wiring, and the light transmittance adjustment layer is used. Ferric chloride aqueous solution Wet etching is performed to form an anode, an anode extraction wiring, and a light transmittance adjustment layer. In addition, the distance between th...
Embodiment 2
[0129] After forming ITO on the entire surface of the transparent substrate by the same method as in Example 1, use a spin coater to form a positive resist TFR790PL made by Ohka on the entire surface of the substrate with a thickness of 2 μm, and leave the anode and anode by photolithography. The wiring is taken out, and wet etching is performed with an aqueous solution of ferric chloride to form an anode, and the wiring for taking out the anode.
[0130] Thereafter, SiN was formed on the entire surface by plasma CVD to have a film thickness of 50 nm, and the transmittance adjustment layer made of SiN was patterned by the same photolithography and dry etching as above.
[0131] Hereinafter, an organic EL display panel was produced in the same manner as in Example 1.
[0132] The thus-obtained organic EL display panel exhibited favorable light emission characteristics and was normally driven.
[0133] In addition, as a result of measuring the light transmittance when not emitt...
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