Adsorbent for removing trace moisture in gas and preparation method thereof

Abstract

The invention discloses an adsorbing agent for removing trace moisture in gas. The adsorbing agent has the advantages that the dehydration water depth is high, the adsorbing capacity is large, the cost is low, and a regeneration property is good. The adsorbing agent for removing the trace moisture in the gas disclosed by the invention is prepared by a method of a metal salt modified molecular sieve which is composed of cerous nitrate, aluminum nitrate and other alkaline earth nitrates, wherein based on the total mass of the modified molecular sieve, the mass percent of a cerium element is 0.02%-10%, the mass percent of an aluminum element is 0.05%-3%, and the mass percent of the other alkaline-earth metal element is 0.08%-10%.

Description

technical field [0001] The invention relates to an adsorbent and a preparation method, in particular to an adsorbent and a preparation method for removing trace moisture in gas. Background technique [0002] In recent years, the electronics industry has become one of the largest industries in the world. The preparation of ultra-high-purity gases, which are mainly used as protective gases, reaction gases and carrier gases in the production of electronic components, has also become a hot topic. The raw material gas used to prepare ultra-high-purity gases often contains a wide variety of impurities, among which trace moisture has a greater impact on the device and is more difficult to remove than other impurities. Therefore, how to remove trace moisture in the gas becomes a preparation One of the difficulties of ultra-high-purity gases. [0003] The methods for removing trace moisture in gas in the prior art are mainly rectification and adsorption. Among them, the adsorption...

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Problems solved by technology

[0004] Although the adsorption method has many advantages, due to the simultaneous desorption process of adsorption, the use of commonly used adsorbents often has the problem of insufficient dehydration depth. As a deep dehydration adsorbent, its shortcoming is that it can only remove moisture in the gas to below 100ppb in the end, and cannot reach a higher depth; The Chinese patent of "Preparation Method" discloses the use of silver salt modified 4A molecular sieve as a deep dehydrating agent. The disadvantage is that it can only remove the moisture in the gas to below 100ppb, which is far from meeting the industrial production requirements of ultra-high-purity gas.