CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer
A technology of photoacoustic sensors and ring arrays, applied in the field of photonics imaging, can solve problems such as difficult millimeter-scale high-density multi-dimensional arrays, and limitations in the promotion and application of photoacoustic imaging, so as to improve excitation and sensing efficiency and dynamic focus Effects of detection ability, improved operability and range of application
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[0019] The present invention will be described in detail below in conjunction with the drawings:
[0020] The structure of this embodiment is Figure 1-3 As shown, a miniature photoacoustic sensor based on a cMUT ring array is provided with a fixed layer 3 on the top and middle of the housing 4, and an optical fiber head 6 is provided in the center of the top of the fixed layer 3, and an optical fiber 7 is inserted into the optical fiber head 6, A lens 8 is provided in the center of the fixed layer 3 and below the fiber head 6; the base 2 of the cMUT ring array probe 13 is glued under the fixed layer 3 under the housing 4, and the cMUT array is provided inside the bottom end of the base 2. Element 1; the cMUT annular array probe 13 is a hollow planar array, and the base 2 of the cMUT annular array probe 13 is provided with k cMUT array elements 1 uniformly arranged on an arc of arc K, and 0 <K ≤ 2π,k = 2,3,...n; the cMUT array element 1 includes i×j vibrating membranes 11 ar...
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