CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer

A technology of photoacoustic sensors and ring arrays, applied in the field of photonics imaging, can solve problems such as difficult millimeter-scale high-density multi-dimensional arrays, and limitations in the promotion and application of photoacoustic imaging, so as to improve excitation and sensing efficiency and dynamic focus Effects of detection ability, improved operability and range of application

Inactive Publication Date: 2014-08-13
JIANGXI SCI & TECH NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, due to the limitations of piezoelectric materials and processes, it is difficult for the above sensors t...

Method used

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  • CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer
  • CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer
  • CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer

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Embodiment Construction

[0019] The present invention will be described in detail below in conjunction with the drawings:

[0020] The structure of this embodiment is Figure 1-3 As shown, a miniature photoacoustic sensor based on a cMUT ring array is provided with a fixed layer 3 on the top and middle of the housing 4, and an optical fiber head 6 is provided in the center of the top of the fixed layer 3, and an optical fiber 7 is inserted into the optical fiber head 6, A lens 8 is provided in the center of the fixed layer 3 and below the fiber head 6; the base 2 of the cMUT ring array probe 13 is glued under the fixed layer 3 under the housing 4, and the cMUT array is provided inside the bottom end of the base 2. Element 1; the cMUT annular array probe 13 is a hollow planar array, and the base 2 of the cMUT annular array probe 13 is provided with k cMUT array elements 1 uniformly arranged on an arc of arc K, and 0

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Abstract

The invention discloses a CMUT (Capacitive Micro-machined Ultrasonic Transducer) annular array based micro-photoacoustic transducer. The CMUT annular array based micro-photoacoustic transducer comprises an optical fiber head, a lens, a CMUT annular array probe, a CMUT array element and a light transmitting protective film. The nondestructive photoacoustic excitation and transducing integrated micro-structure is achieved and the CMUT annular array based micro-photoacoustic transducer can be widely applied to the fields of blood sugar and blood oxygen detection, brain damage diagnoses, breast cancer censuses, endoscopic type medical imaging, industrial inspection and detection and the like.

Description

Technical field [0001] The invention relates to the technical field of photonics imaging, in particular to a miniature photoacoustic sensor based on a cMUT ring array. Background technique [0002] Photoacoustic imaging is a non-invasive, non-destructive photonics detection technology using ultrasound as the medium. It combines the advantages of pure optical technology and pure ultrasound technology, and uses ultrasonic detection instead of detecting scattered photons, thus avoiding the shortcomings of high scattering, low sensitivity, low detection depth, strong interference and other methods such as near infrared spectroscopy in principle. Compared with other photonics methods, it shows more attractive advantages. [0003] Different types of acoustic wave sensors are one of the key equipment of the photoacoustic detection system, such as piezoelectric sensors, capacitive sensors, non-contact optical detectors, etc. At present, the commonly used detection devices in photoacousti...

Claims

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Application Information

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IPC IPC(8): A61B5/1455A61B5/00A61B1/05A61B8/08A61B8/12A61B8/00G01N21/17
Inventor 曾吕明刘国栋
Owner JIANGXI SCI & TECH NORMAL UNIV
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