Axicon cone angle detection device and detection method based on dual-wavelength light source

Abstract

Provided is an axicon cone angle detection device and method based on a dual-wavelength light source. The device is characterized by being composed of the dual-wavelength light source, a focusing lens, a small filtering hole, a spectroscope, a collimating lens, an imaging lens, a first image sensor, a second image sensor, a first position adjustment mechanism and a second position adjustment mechanism. The device and method have the advantages that the structure is simple, calculation is convenient and a standard lens is not needed.

Description

Technical field [0001] The invention relates to the field of optical detection, in particular to an axicon cone angle detection device and a detection method based on a dual-wavelength light source. technical background [0002] As a rotationally symmetric pyramidal optical element, the axicon lens can provide a long focal depth for the optical system. This advantage makes it widely used in laser beam shaping, laser drilling, optical inspection, laser resonant cavity, non-diffracted beam In particular, the use of axicons in the lithography illumination system can realize the ring illumination mode. The high-precision, large-scale detection of the cone angle of the axicon has always attracted attention. [0003] Prior art [1] (M. de Angelis, S. De Nicola, P. Ferraro, et al. "Test of a conical lens using a two-beam shearing interferometer", Opt Laser Eng. 39: 155-163 (2003) .) Using two beams of light shearing interference technology to detect the angle formed by the axicon plane a...

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Problems solved by technology

[0003] Prior Art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of a conical lensusing a two-beam shearing interferometer", Opt Laser Eng.39:155-163(2003) .) Using two-beam light shearing interference technology to detect the angle formed by the axicon plane and the conical surface, its optical structure requires two beams of coherent light with a small angle to pass through the axicon, and calculate the two Calculate the cone angle after beam phase difference, the calculation process is more complicated

[0004] Prior art [2] (Jun Ma, Christof Pruss, Matthias, et al. "Systematic analysis of themeasurement of cone angles using high line density computer-generated holograms", Optical Engineering.50(5):05580-1-05880- 9(2011).) Use the Twyman-Green interferometer to detect the cone angle of the axicon mirror. Before the detection, a computational hologram with high linear density needs to be produced as a standard mirror. The processing of the computational hologram is difficult and costly

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