Valveless micropump suction cup driven by laminated radial hybrid compliant structure

Abstract

A valveless micro pump sucker driven by a laminated radiation type mixed-connected compliance structure comprises a laminated type mixed-connected compliance amplifying mechanism, stacked piezoelectric ceramic sheets and a thin-film micro pump. The amplifying mechanism converts the radial input displacement to axial output displacement, namely structurally bonding and assembling a plurality of radiation type parallelly-connected compliance amplifying mechanism sheets with the same shapes after the radiation type parallelly-connected compliance amplifying mechanism sheets are connected in series, stacked and aligned vertically according to the output movement features; the stacked piezoelectric ceramic sheets are fixed to the amplifying mechanism, and high-frequency radial deforming displacement input is performed on the amplifying mechanism after powering on; the thin-film micro pump is adhered to the lower portion of the amplifying mechanism, and the bottom is provided with a sink groove type adsorption cavity used for absorbing the wall; the amplifying mechanism converts the high-frequency radial deforming displacement input by the stacked piezoelectric ceramic sheets to axial output displacement and drives the thin-film micro pump to operate, and the gas in the absorption cavity flow in an orientated manner to produce stable negative pressure. The valveless micro pump sucker is small in size, light, low in gravity center, free of noise and stable in high-frequency dynamic characteristics and is adaptive to serving as an absorption device of a wall climbing robot.

Description

technical field [0001] The invention relates to a micro-adsorption device that can be used for a legged wall-climbing robot, in particular to a valveless micro-pump suction cup driven by a laminated radial hybrid compliant structure, which belongs to the technical field of micro-electromechanical systems and special robots. Background technique [0002] With the rapid development of modern mechanical engineering technology, MEMS technology has realized the development and production of low-cost, high-precision, and large-volume micro-nano-scale products, which has greatly promoted the rapid development of high-tech industries such as medical treatment, chemical measurement, and computer electronics. . Microfluidic system is one of the representatives of MEMS applications, and has been widely used in biochemical testing, drug syringes, temperature control equipment, precision electromechanical and other fields. Its core component is a microflow pump, which works by relying on...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the disadvantages of traditional vacuum pumps such as large volume, high center of gravity, high operating noise, and high energy consumption, and provide a valveless micropump suction cup driven by a stacked radial hybrid compliant structure, using stacked piezoelectric ceramics The large bearing capacity of the sheet and the large force and high stability of the parallel compliant mechanism convert the input radial displacement into the output axial displacement through the parallel flexible hinge transmission structure, and drive the valveless micro pump to work to generate sufficient adsorption force , the invention has the advantages of small size, light weight, low center of gravity, high control precision, no noise, low energy consumption, easy packaging and no need for external air source or motor, etc., and at the same time realizes the goal of integrating the vacuum micropump and the suction cup

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