Single black and white ccd phase shift dual wavelength interferometry method based on specific phase shift

A dual-wavelength interference and phase-shifting interference technology, which is applied in the field of single-black-and-white CCD phase-shifting dual-wavelength interferometry, can solve problems such as difficult guarantees, errors, and separation of single-wavelength interferograms, and achieve small quantities, elimination, and flexible phases. The effect of displacement selection
CN104236452BInactive Publication Date: 2017-08-25SOUTH CHINA NORMAL UNIVERSITY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SOUTH CHINA NORMAL UNIVERSITY
Publication Date
2017-08-25
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a single-black-and-white CCD phase-shift dual-wavelength interferometric method based on a specific phase shift amount, which includes step 1: constructing a co-path coaxial dual-wavelength interference system, and injecting lasers with two wavelengths of wavelength λ1 and λ2 into the interferometric In the system, adjust the lasers with two wavelengths to form an interferogram along the exact same path; second: adjust the parameters of a single black and white CCD to simultaneously collect two wavelengths of the interferogram; third: use a single black and white CCD to collect the dual waves generated by two wavelengths at the same time Long phase-shift interferogram; 4: From the collected dual-wavelength phase-shift interferogram, separate two sets of single-wavelength phase-shift interference signal images that eliminate the background; 5: Separate two sets of single-wavelength phase-shift interference signal images Carry out normalization processing; Sixth: Calculate the single-wavelength package phase diagram under the wavelengths λ1 and λ2, Seventh: Calculate the synthetic wavelength phase of the wavelengths λ1 and λ2, so as to obtain the surface three-dimensional topography information of the object to be measured. The method is simple and easy to implement.
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Description

technical field

[0001] The invention relates to the fields of optical interferometry and digital holographic measurement, in particular to a single-black-and-white CCD phase-shift dual-wavelength interferometry method based on a specific phase shift. Background technique

[0002] Dual-wavelength interferometry is an optical interferometry technique in which two light sources of different wavelengths are used to record the interferogram of the same object, and after measuring the wrapping phase of the object at two single wavelengths, combined with the dual-wavelength phase The unwrapping technology obtains the synthetic wavelength and phase information, so as to truly reflect the three-dimensional shape of the object. Dual-wavelength interferometry technology makes up for the shortcomings of single-wavelength interferometry that cannot obtain correct results when the phase jump between adjacent points is greater than half the measurement wavelength, and expands the range of ...

Claims

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