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A MEMS cantilever beam accelerometer and its manufacturing process

An accelerometer and cantilever beam technology, applied in the field of sensors, can solve the problems of reducing the detection reliability of the accelerometer, the vibration mode shape is not symmetrical, the collision between the mass block and the frame, etc., so as to ensure the detection stability and reduce the crosstalk. and impact, high-accuracy effects

Active Publication Date: 2018-02-02
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

makes the swing mode shape of this accelerometer less symmetrical
In addition, when the external impact force is large, the cantilever beam will break and the mass block will collide with the frame.
Not only greatly reduces the detection reliability of the accelerometer, but even makes the accelerometer unable to work

Method used

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  • A MEMS cantilever beam accelerometer and its manufacturing process
  • A MEMS cantilever beam accelerometer and its manufacturing process
  • A MEMS cantilever beam accelerometer and its manufacturing process

Examples

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Embodiment Construction

[0055] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0056] refer to figure 1 According to a MEMS cantilever accelerometer provided by the present invention, it comprises: a measuring body 1, an upper cover plate 2 connected to the measuring body 1 and a lower cover plate 3; the measuring body 1 adopts an upper silicon The epitaxial silicon-on-insulator structure of the layer 4 and the lower silicon layer 5 is referred to as the SOI structure. A buried oxide layer 6 is respectively arranged between each silicon layer.

[0057] see figure 2 , the measuring body 1 includes a frame 11 and a mass block 12 located in the frame 11 ; the mass block 12 and the frame 11 are connected by a cantilever beam 13 . A plurality of cantilever beams 13 are arranged in the space between the proof mass 12 and the frame 11 . Preferably, the mass block 12 is a square, and the cantilever beams are symmetrically arranged on both sides of ...

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Abstract

A MEMS cantilever beam accelerometer, comprising: a measuring body, an upper cover plate connected to the measuring body and a lower cover plate; the measuring body includes a frame, a mass block positioned in the frame, and the mass block It is connected with the frame through a plurality of cantilever beams; a buffer beam is also arranged between the mass block and the frame, one end of the buffer beam is connected with the mass block, and the other end of the buffer beam One end is connected to the frame. The buffer beam can effectively protect the accelerometer from damage due to excessive external force.

Description

technical field [0001] The invention relates to the field of sensors, in particular to an accelerometer and a manufacturing process thereof. Background technique [0002] Today, accelerometers are used in many applications, such as measuring the intensity of earthquakes and collecting data, detecting the impact strength of automobile collisions, and detecting the angle and direction of tilt in mobile phones and game consoles. With the continuous advancement of microelectromechanical systems (MEMS) technology, many small accelerometers at the nanometer scale have been widely used commercially. [0003] A traditional capacitive accelerometer, such as a Chinese patent with the patent number ZL03112312.0 and an announcement date of May 30, 2007, includes a cantilever beam and a mass. When there is acceleration, the mass block of the accelerometer will move towards the acceleration direction, so that the gap distance between the mass block and the electrode will change and lead ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125B81C1/00
Inventor 孙晨于连忠
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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