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Large-area uniform Raman detection chip sensitized by porous membrane and preparation method thereof

A detection chip and porous film technology, applied in the field of optical detection, can solve the problems of complex SERS chip process, high cost, fingerprint Raman signal interference, etc. Effect

Active Publication Date: 2017-10-27
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In the process of realizing the present invention, the applicant found that the SERS chip with good repeatability and high sensitivity prepared by the prior art requires complex processes and high costs, and it is difficult to avoid the generation of electromagnetically enhanced metal nanostructures and molecules to be tested. Especially the interference of the Raman signal of the fingerprint of the molecule to be tested caused by the direct contact with the biomolecule to be tested

Method used

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  • Large-area uniform Raman detection chip sensitized by porous membrane and preparation method thereof
  • Large-area uniform Raman detection chip sensitized by porous membrane and preparation method thereof
  • Large-area uniform Raman detection chip sensitized by porous membrane and preparation method thereof

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no. 1 example

[0035] In the first exemplary embodiment of the present invention, a large-area uniform Raman detection chip sensitized by a porous membrane is proposed. Figure 1A It is a schematic cross-sectional view of a large-area uniform Raman detection chip sensitized by a porous membrane according to the first embodiment of the present invention. Such as Figure 1AAs shown, the large-area uniform Raman detection chip sensitized by the porous membrane comprises: a substrate 1; a transition film 10 formed on the upper surface of the substrate 1; a gold film 11 formed on the upper surface of the transition film 10; The reinforced structure film 2 is formed on the outer surface of the gold film 11, which is used as the electromagnetic enhancement layer of the Raman detection chip in this embodiment; the nanoporous film 3 is formed on the outer surface of the gold-based reinforced structure film 2 to enrich the To measure molecules, increase the number of molecules to be measured within the...

no. 3 example

[0057] In the third exemplary embodiment of the present invention, a method for preparing the porous membrane-sensitized large-area uniform Raman detection chip described in the second embodiment is also provided. figure 2 It is a flowchart of a method for preparing a large-area uniform Raman detection chip sensitized by a porous membrane according to the third embodiment of the present invention.

[0058] Please refer to Figure 1 and figure 2 , the preparation method comprises:

[0059] Step S202: preparing a transition film 10 on the substrate 1;

[0060] Wherein, the substrate can be selected from one of flat glass, silicon wafer, ceramic wafer and metal wafer. Before preparing the transition film, the substrate needs to be cleaned. The cleaning process can be done according to the standard procedure.

[0061] The transition film is prepared by vacuum deposition technique on the upper surface of the cleaned substrate. The material of the transition film is chromium, ...

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Abstract

The invention provides a porous film-sensitized large-area uniform Raman detection chip and a preparation method thereof. The Raman detection chip includes: a substrate; a gold-based reinforced structure film formed on the substrate as an electromagnetic enhancement layer of the Raman detection chip; and a nanoporous film formed on the outer surface of the gold-based reinforced structure film to Enrich the molecules to be tested. In the present invention, the nanoporous membrane as a molecular enrichment layer can significantly increase the number of molecules to be detected within the range of the locally enhanced electric field, thereby improving the Raman detection sensitivity of the chip, and is especially suitable for the detection of ultra-low concentration small molecular substances. The Raman detection chip of the present invention has the advantages of low preparation cost, good large-area uniformity, and can suppress the interference of metal Raman fingerprints of molecules to be measured, and the like.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a porous film sensitized large-area uniform Raman detection chip and a preparation method thereof. Background technique [0002] Raman scattering is a type of inelastic scattering. Due to the partial energy transfer between the incident light and the molecular vibration mode, the frequency of the scattered light changes compared with the incident light. This frequency shift is called Raman shift, which is closely related to the molecular structure. By measuring the Raman shift, it can be deduced Show molecular structure. [0003] Raman spectroscopy measurement methods are widely used in environmental monitoring, food safety testing, judicial identification, material analysis, biological science research and other fields. However, the Raman scattering cross section of most molecules is very small, making the Raman scattering light very weak, especially when the concent...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/65
Inventor 逯丹凤刘德龙祁志美
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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