Method for evaluating material sub-surface machining damage layer thickness
A technology of subsurface damage and damage layer, which is applied in the evaluation field of material subsurface processing damage layer thickness, can solve the problem of non-damage detection difficulty of subsurface damage layer thickness, achieve wide applicability and reduce the number of tests
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2015-03-25
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of material surface processing quality evaluation, and in particular relates to a method for evaluating the thickness of a material subsurface processing damage layer. Background technique
[0002] With my country's increasing requirements for high-precision processing in the fields of energy, space, national defense equipment, and integrated circuits, the evaluation of the surface processing integrity of various precision components is the basis for meeting the increasing technical indicators. Surface integrity evaluation mainly includes surface roughness, surface profile and thickness of subsurface damage layer. At present, there are many methods for quality evaluation of surface roughness and surface profile, such as surface roughness meter and surface profiler. The evaluation of sub-surface processing quality can be mainly divided into two types: damage detection and non-damage detection.
[0003] At p...
Examples
Embodiment Construction
[0029] The evaluation method of the present invention first detects the surface roughness of the material sample: if the range of the surface roughness of the material sample is not within Ra50nm~400nm, the test is abandoned; if the range of the surface roughness of the material sample is Ra50nm~400nm; then the material sample is tested. Indentation test; the process is as follows: first set the load, with 45μN as the initial load and 50-200μN as the increment, set the load in turn, and the end load is 1500μN; the increment between every two adjacent set loads It can be the same or different; then carry out the indentation test on the material sample, carry out the loading-unloading test in order according to the set load from small to large and record the maximum displacement value of the indenter in each load loading-unloading test; when When the maximum displacement value produced by the selected load increases by more than 50% compared with the maximum displacement value pr...